Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386271 | Multi-layer calibration for empirical overlay measurement | Nigel P. Smith, Francis Scott Hoover, Kevin Eduard Heidrich | 2025-08-12 |
| 12013350 | Effective cell approximation model for logic structures | Kevin Eduard Heidrich | 2024-06-18 |
| 11808715 | Target for optical measurement of trenches | George Andrew Antonelli | 2023-11-07 |
| 11668644 | Opto-acoustic measurement of a transparent film stack | George Andrew Antonelli, Manjusha Mehendale, Robin Mair | 2023-06-06 |
| 11079220 | Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance | — | 2021-08-03 |
| 10883924 | Metallic gratings and measurement methods thereof | Sam O' Mullane, Alain C. Diebold, Brennan Peterson | 2021-01-05 |
| 10061210 | 3D target for monitoring multiple patterning process | Jiangtao Hu | 2018-08-28 |