Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386271 | Multi-layer calibration for empirical overlay measurement | Francis Scott Hoover, Nicholas James Keller, Kevin Eduard Heidrich | 2025-08-12 |
| 11597429 | Electric power assisted steering | Russell Wilson-Jones, Timothy Buttery, Andrew W. Reynolds, Thomas Haines | 2023-03-07 |
| 11557967 | Voltage regulator with adaptive feed-forward compensation for periodic loads | Florian Feckl, Erich Bayer | 2023-01-17 |
| 11150195 | Sample surface polarization modification in interferometric defect inspection | — | 2021-10-19 |
| 10935501 | Sub-resolution defect detection | — | 2021-03-02 |
| 10937705 | Sample inspection using topography | Holly M. Edmundson, Michael Gilmore | 2021-03-02 |
| 10830709 | Interferometer with pixelated phase shift mask | — | 2020-11-10 |
| 10774891 | Electromechanical actuator | — | 2020-09-15 |
| 10773701 | Electromechanical actuator | — | 2020-09-15 |
| 10288408 | Scanning white-light interferometry system for characterization of patterned semiconductor features | George Andrew Antonelli | 2019-05-14 |
| 10229648 | Programmable level shifter for LCD systems | Roland Bucksch | 2019-03-12 |
| 10107621 | Image based overlay measurement with finite gratings | — | 2018-10-23 |
| 9564105 | Programmable level shifter for LCD systems | Roland Bucksch | 2017-02-07 |
| 9239523 | Diffraction based overlay linearity testing | Jie Li, Zhuan Liu, Silvio J. Rabello | 2016-01-19 |
| 8674744 | Electronic device and method for providing a digital signal at a level shifter output | Byoung-Suk Kim, Stefan Reithmaier | 2014-03-18 |
| 8390556 | Level shifter for use in LCD display applications | Byoung-Suk Kim, Stefan Reithmaier | 2013-03-05 |
| 8339605 | Multilayer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Lewis A. Binns, Jaime D. Morillo | 2012-12-25 |
| 8107079 | Multi layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Lewis A. Binns, Jaime D. Morillo | 2012-01-31 |
| 7876439 | Multi layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Lewis A. Binns, Jaime D. Morillo | 2011-01-25 |
| 7847939 | Overlay measurement target | Yi-Sha Ku, Hsiu Lan Pang | 2010-12-07 |
| 7808643 | Determining overlay error using an in-chip overlay target | Kevin Eduard Heidrich | 2010-10-05 |
| 7800824 | Method for designing gratings | Shih-Chun Wang, Yi-Sha Ku, Chun-Hung Ko, Deh-Ming Shyu | 2010-09-21 |
| 7619753 | Method for measuring dimensions and optical system using the same | An-Shun Liu, Yi-Sha Ku | 2009-11-17 |
| 7532317 | Scatterometry method with characteristic signatures matching | Yi-Sha Ku, Shih-Chun Wang, Chun-Hung Ko | 2009-05-12 |
| 7477396 | Methods and systems for determining overlay error based on target image symmetry | Yi-Sha Ku, Hsiu Lan Pang | 2009-01-13 |