Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8321821 | Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same | Yi-Sha Ku, Wei-Te Hsu, Deh-Ming Shyu | 2012-11-27 |
| 8250497 | Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the same | Wei-Te Hsu, Yi-Sha Ku, Deh-Ming Shyu | 2012-08-21 |
| 8139233 | System and method for via structure measurement | Yi-Sha Ku, Wei-Te Hsu, Deh-Ming Shyu | 2012-03-20 |
| 7847939 | Overlay measurement target | Nigel P. Smith, Yi-Sha Ku | 2010-12-07 |
| 7477396 | Methods and systems for determining overlay error based on target image symmetry | Nigel P. Smith, Yi-Sha Ku | 2009-01-13 |