Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9182681 | Method and system for measuring a stacking overlay error by focusing on one of upper and lower layer overlay marks using a differential interference contrast microscope | Yi-Sha Ku | 2015-11-10 |
| 8830458 | Measurement systems and measurement methods | Yi-Sha Ku | 2014-09-09 |
| 8537213 | Method for measuring via bottom profile | Yi-Sha Ku, Wei-Te Hsu | 2013-09-17 |
| 8319971 | Scatterfield microscopical measuring method and apparatus | Sen-Yih Chou, Yi-Sha Ku | 2012-11-27 |
| 8321821 | Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same | Yi-Sha Ku, Hsiu Lan Pang, Wei-Te Hsu | 2012-11-27 |
| 8250497 | Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the same | Wei-Te Hsu, Yi-Sha Ku, Hsiu Lan Pang | 2012-08-21 |
| 8139233 | System and method for via structure measurement | Yi-Sha Ku, Wei-Te Hsu, Hsiu Lan Pang | 2012-03-20 |
| 7872741 | Method and apparatus for scatterfield microscopical measurement | Sen-Yih Chou, Shu-Ping Dong, Wei-Te Hsu, Chia-Lin Wu, Yi-Sha Ku +1 more | 2011-01-18 |
| 7864324 | Reflective scatterometer | Yi-Sha Ku, Sen-Yih Chou, Shu-Ping Dong, Wei-Te Hsu | 2011-01-04 |
| 7800824 | Method for designing gratings | Shih-Chun Wang, Yi-Sha Ku, Chun-Hung Ko, Nigel P. Smith | 2010-09-21 |
| 7652776 | Structure and method for overlay measurement | Yi-Sha Ku | 2010-01-26 |
| 7430052 | Method for correlating the line width roughness of gratings and method for measurement | Yi-Sha Ku | 2008-09-30 |
| 7355713 | Method for inspecting a grating biochip | Chun-Hung Ko, Yi-Sha Ku, Nigel P. Smith | 2008-04-08 |
| 6724532 | Dual-lens hybrid diffractive/refractive imaging system | Chiun-Lern Fu, Tsung-Hsin Lin, Hsin-Yih Lin, Mao Lu | 2004-04-20 |