Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354290 | Sample depth-measuring device and method | Chia-Hung Cho, Cheng-Kang Lee | 2025-07-08 |
| 12007221 | Heterogeneous integration detecting method and heterogeneous integration detecting apparatus | Hsiang-Chun Wei, Chih-Hsiang Liu, Chung-Lun Kuo, Chun-Wei Lo, Chieh-Yi Lo | 2024-06-11 |
| 11248903 | Three-dimension measurement device and operation method thereof | Chia-Hung Cho, Po-Yi Chang, Kai-Ping Chuang, Chih-Hsiang Liu, Fu-Cheng Yang | 2022-02-15 |
| 10094774 | Scattering measurement system and method | Chia-Liang Yeh, Yi-Chang Chen, Chun-Wei Lo | 2018-10-09 |
| 9752866 | Measurement system | Hsiang-Chun Wei, Chia-Hung Cho, Chieh-Yu Wu, Chun-Wei Lo, Chih-Hsiang Liu | 2017-09-05 |
| 9182681 | Method and system for measuring a stacking overlay error by focusing on one of upper and lower layer overlay marks using a differential interference contrast microscope | Deh-Ming Shyu | 2015-11-10 |
| 8830458 | Measurement systems and measurement methods | Deh-Ming Shyu | 2014-09-09 |
| 8699021 | System, method and computer readable medium for through silicon via structure measurement | Wei-Te Hsu | 2014-04-15 |
| 8537213 | Method for measuring via bottom profile | Deh-Ming Shyu, Wei-Te Hsu | 2013-09-17 |
| 8386969 | Method for designing overlay targets and method and system for measuring overlay error using the same | Wei-Te Hsu | 2013-02-26 |
| 8321821 | Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same | Hsiu Lan Pang, Wei-Te Hsu, Deh-Ming Shyu | 2012-11-27 |
| 8319971 | Scatterfield microscopical measuring method and apparatus | Deh-Ming Shyu, Sen-Yih Chou | 2012-11-27 |
| 8250497 | Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the same | Wei-Te Hsu, Hsiu Lan Pang, Deh-Ming Shyu | 2012-08-21 |
| 8139233 | System and method for via structure measurement | Wei-Te Hsu, Hsiu Lan Pang, Deh-Ming Shyu | 2012-03-20 |
| 7872741 | Method and apparatus for scatterfield microscopical measurement | Sen-Yih Chou, Shu-Ping Dong, Wei-Te Hsu, Deh-Ming Shyu, Chia-Lin Wu +1 more | 2011-01-18 |
| 7864324 | Reflective scatterometer | Deh-Ming Shyu, Sen-Yih Chou, Shu-Ping Dong, Wei-Te Hsu | 2011-01-04 |
| 7847939 | Overlay measurement target | Nigel P. Smith, Hsiu Lan Pang | 2010-12-07 |
| 7800824 | Method for designing gratings | Shih-Chun Wang, Chun-Hung Ko, Deh-Ming Shyu, Nigel P. Smith | 2010-09-21 |
| 7652776 | Structure and method for overlay measurement | Deh-Ming Shyu | 2010-01-26 |
| 7619753 | Method for measuring dimensions and optical system using the same | An-Shun Liu, Nigel P. Smith | 2009-11-17 |
| 7532317 | Scatterometry method with characteristic signatures matching | Nigel P. Smith, Shih-Chun Wang, Chun-Hung Ko | 2009-05-12 |
| 7477396 | Methods and systems for determining overlay error based on target image symmetry | Nigel P. Smith, Hsiu Lan Pang | 2009-01-13 |
| 7433060 | Method for correlating a structural parameter of a plurality of gratings and method for determining a structural parameter value of an unknown grating using the same | An-Shun Liu | 2008-10-07 |
| 7430052 | Method for correlating the line width roughness of gratings and method for measurement | Deh-Ming Shyu | 2008-09-30 |
| 7379184 | Overlay measurement target | Nigel P. Smith, Hsin Lan Pang | 2008-05-27 |