Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9239523 | Diffraction based overlay linearity testing | Jie Li, Zhuan Liu, Nigel P. Smith | 2016-01-19 |
| 8817273 | Dark field diffraction based overlay | Hwan J. Jeong, Thomas Andre Casavant | 2014-08-26 |
| 8525993 | Scatterometry measurement of asymmetric structures | William A. McGahan, Jie Li, Yongdong Liu | 2013-09-03 |
| 8170838 | Simulating two-dimensional periodic patterns using compressed fourier space | William A. McGahan, Jie Li | 2012-05-01 |
| 7508976 | Local process variation correction for overlay measurement | Weidong Yang, Roger R. Lowe-Webb | 2009-03-24 |
| 6992764 | Measuring an alignment target with a single polarization state | Weidong Yang, Roger R. Lowe-Webb, John D. Heaton | 2006-01-31 |