Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8525993 | Scatterometry measurement of asymmetric structures | Silvio J. Rabello, Jie Li, Yongdong Liu | 2013-09-03 |
| 8170838 | Simulating two-dimensional periodic patterns using compressed fourier space | Silvio J. Rabello, Jie Li | 2012-05-01 |
| 7372565 | Spectrometer measurement of diffracting structures | James M. Holden, Richard A. Yarussi, Pablo I. Rovira, Roger R. Lowe-Webb | 2008-05-13 |
| 7202958 | Modeling a sample with an underlying complicated structure | — | 2007-04-10 |
| 7115858 | Apparatus and method for the measurement of diffracting structures | James M. Holden, Richard A. Yarussi, Pablo I. Rovira, Roger R. Lowe-Webb | 2006-10-03 |
| 6898537 | Measurement of diffracting structures using one-half of the non-zero diffracted orders | — | 2005-05-24 |
| 6836690 | High precision substrate prealigner | Blaine R. Spady, James V. Read, Arosha W. Goonesekera, Eric Alexander Rost | 2004-12-28 |
| 6381009 | Elemental concentration measuring methods and instruments | — | 2002-04-30 |