Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11562289 | Loosely-coupled inspection and metrology system for high-volume production process monitoring | Song Wu, Yin Xu, Andrei V. Shchegrov, Lie-Quan Lee, Jonathan M. Madsen | 2023-01-24 |
| 11268901 | Variable aperture mask | Barry Blasenheim, Noam Sapiens, Michael Friedmann | 2022-03-08 |
| 10663392 | Variable aperture mask | Barry Blasenheim, Noam Sapiens, Michael Friedmann | 2020-05-26 |
| 10139352 | Measurement of small box size targets | Stilian Ivanov Pandev, Wei Lu, Andrei V. Shchegrov, Jonathan M. Madsen | 2018-11-27 |
| 8825444 | Automated system check for metrology unit | Jaime Poris, Jonathan M. Madsen, Scott Penner | 2014-09-02 |
| 8427645 | Mueller matrix spectroscopy using chiroptic | Pedro Vagos | 2013-04-23 |
| 7372565 | Spectrometer measurement of diffracting structures | James M. Holden, William A. McGahan, Richard A. Yarussi, Roger R. Lowe-Webb | 2008-05-13 |
| 7173417 | Eddy current sensor with concentric confocal distance sensor | Jaime Poris, Claudio L. Rampoldi, Christopher W. Blaufus | 2007-02-06 |
| 7115858 | Apparatus and method for the measurement of diffracting structures | James M. Holden, William A. McGahan, Richard A. Yarussi, Roger R. Lowe-Webb | 2006-10-03 |
| 7064828 | Pulsed spectroscopy with spatially variable polarization modulation element | Lars Markwort | 2006-06-20 |
| 7061613 | Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation | Chunsheng Huang, Jaime Poris | 2006-06-13 |
| 6856384 | Optical metrology system with combined interferometer and ellipsometer | — | 2005-02-15 |
| 6713753 | Combination of normal and oblique incidence polarimetry for the characterization of gratings | Guorong V. Zhuang, John D. Heaton | 2004-03-30 |
| 6665070 | Alignment of a rotatable polarizer with a sample | Richard A. Yarussi | 2003-12-16 |
| 6522406 | Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer | Richard A. Yarussi, James M. Holden, Roger R. Lowe-Webb | 2003-02-18 |