Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8259296 | Scanning focal length metrology | Martin Ebert | 2012-09-04 |
| 8259297 | Scanning focal length metrology | — | 2012-09-04 |
| 7697135 | Scanning focal length metrology | Martin Ebert | 2010-04-13 |
| 7372565 | Spectrometer measurement of diffracting structures | James M. Holden, William A. McGahan, Pablo I. Rovira, Roger R. Lowe-Webb | 2008-05-13 |
| 7295314 | Metrology/inspection positioning system | Blaine R. Spady, John D. Heaton, Robert Buchanan | 2007-11-13 |
| 7289215 | Image control in a metrology/inspection positioning system | Blaine R. Spady, John D. Heaton, Robert Buchanan | 2007-10-30 |
| 7115858 | Apparatus and method for the measurement of diffracting structures | James M. Holden, William A. McGahan, Pablo I. Rovira, Roger R. Lowe-Webb | 2006-10-03 |
| 6665070 | Alignment of a rotatable polarizer with a sample | Pablo I. Rovira | 2003-12-16 |
| 6522406 | Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer | Pablo I. Rovira, James M. Holden, Roger R. Lowe-Webb | 2003-02-18 |
| 6320609 | System using a polar coordinate stage and continuous image rotation to compensate for stage rotation | Robert Buchanan, Blaine R. Spady | 2001-11-20 |
| 6181427 | Compact optical reflectometer system | Blaine R. Spady | 2001-01-30 |