| 12339493 |
Photonic chip and method of manufacture |
David Thomson, Graham Reed, Wei Zhang |
2025-06-24 |
|
| 12204826 |
Method and apparatus for inspection and metrology |
Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Guangqing Chen, Pieter Jacob Mathias Hendrik Knelissen +5 more |
2025-01-21 |
|
| 12189182 |
Photonic chip and method of manufacture |
David Thomson, Graham Reed, Weiwei Zhang |
2025-01-07 |
|
| 11874540 |
Capacitor resonator modulator |
Weiwei Zhang, Graham Reed, David Thomson, Shinichi Saito |
2024-01-16 |
|
| 11580274 |
Method and apparatus for inspection and metrology |
Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Guangqing Chen, Pieter Jacob Mathias Hendrik Knelissen +5 more |
2023-02-14 |
$75,825,000 |
| 11429029 |
Method and apparatus for illumination adjustment |
Maurits Van Der Schaar, Patrick Warnaar, Youping Zhang, Arie Jeffrey Den Boef, Feng Xiao |
2022-08-30 |
$42,848,000 |
| 10620550 |
Metrology method and apparatus |
Martin Jacobus Johan Jak, Arie Jeffrey Den Boef, Nitesh Pandey |
2020-04-14 |
$17,444,000 |
| 10379445 |
Metrology method, target and substrate |
Martin Jacobus Johan Jak, Arie Jeffrey Den Boef |
2019-08-13 |
|
| 10338401 |
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method |
Gerbrand Van Der Zouw, Martin Jacobus Johan Jak |
2019-07-02 |
$13,257,000 |
| 10254658 |
Metrology method, target and substrate |
Daan Maurits Slotboom, Arie Jeffrey Den Boef |
2019-04-09 |
$22,209,000 |
| 10133188 |
Metrology method, target and substrate |
Martin Jacobus Johan Jak, Arie Jeffrey Den Boef |
2018-11-20 |
$10,368,000 |
| 9753296 |
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method |
Gerbrand Van Der Zouw, Martin Jacobus Johan Jak |
2017-09-05 |
$4,838,000 |
| 8830472 |
Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus |
Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Henricus Petrus Maria Pellemans |
2014-09-09 |
$3,866,000 |
| 8259296 |
Scanning focal length metrology |
Richard A. Yarussi |
2012-09-04 |
$1,441,000 |
| 7697135 |
Scanning focal length metrology |
Richard A. Yarussi |
2010-04-13 |
$5,270,000 |
| 7342661 |
Method for noise improvement in ellipsometers |
Lanhua Wei |
2008-03-11 |
|
| 7321427 |
Multiple beam ellipsometer |
Li Chen |
2008-01-22 |
|
| 7136164 |
Multiple beam ellipsometer |
Li Chen |
2006-11-14 |
|
| 7030984 |
Fast wafer positioning method for optical metrology |
Ilya Chizhov |
2006-04-18 |
$490,000 |
| 6985228 |
Multiple beam ellipsometer |
Li Chen |
2006-01-10 |
|
| 6952261 |
System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size |
— |
2005-10-04 |
$517,000 |
| 6952258 |
Wafer chuck with integrated reference sample |
Thomas Traber |
2005-10-04 |
$517,000 |
| 6798512 |
Multiple beam ellipsometer |
Li Chen |
2004-09-28 |
$1,810,000 |
| 6757059 |
Wafer chuck with integrated reference sample |
Thomas Traber |
2004-06-29 |
$3,185,000 |
| 6747746 |
System and method for finding the center of rotation of an R-theta stage |
Ilya Chizhov |
2004-06-08 |
$3,053,000 |
