Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339493 | Photonic chip and method of manufacture | David Thomson, Graham Reed, Wei Zhang | 2025-06-24 |
| 12204826 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Guangqing Chen, Pieter Jacob Mathias Hendrik Knelissen +5 more | 2025-01-21 |
| 12189182 | Photonic chip and method of manufacture | David Thomson, Graham Reed, Weiwei Zhang | 2025-01-07 |
| 11874540 | Capacitor resonator modulator | Weiwei Zhang, Graham Reed, David Thomson, Shinichi Saito | 2024-01-16 |
| 11580274 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Guangqing Chen, Pieter Jacob Mathias Hendrik Knelissen +5 more | 2023-02-14 |
| 11429029 | Method and apparatus for illumination adjustment | Maurits Van Der Schaar, Patrick Warnaar, Youping Zhang, Arie Jeffrey Den Boef, Feng Xiao | 2022-08-30 |
| 10620550 | Metrology method and apparatus | Martin Jacobus Johan Jak, Arie Jeffrey Den Boef, Nitesh Pandey | 2020-04-14 |
| 10379445 | Metrology method, target and substrate | Martin Jacobus Johan Jak, Arie Jeffrey Den Boef | 2019-08-13 |
| 10338401 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Gerbrand Van Der Zouw, Martin Jacobus Johan Jak | 2019-07-02 |
| 10254658 | Metrology method, target and substrate | Daan Maurits Slotboom, Arie Jeffrey Den Boef | 2019-04-09 |
| 10133188 | Metrology method, target and substrate | Martin Jacobus Johan Jak, Arie Jeffrey Den Boef | 2018-11-20 |
| 9753296 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Gerbrand Van Der Zouw, Martin Jacobus Johan Jak | 2017-09-05 |
| 8830472 | Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Henricus Petrus Maria Pellemans | 2014-09-09 |
| 8259296 | Scanning focal length metrology | Richard A. Yarussi | 2012-09-04 |
| 7697135 | Scanning focal length metrology | Richard A. Yarussi | 2010-04-13 |
| 7342661 | Method for noise improvement in ellipsometers | Lanhua Wei | 2008-03-11 |
| 7321427 | Multiple beam ellipsometer | Li Chen | 2008-01-22 |
| 7136164 | Multiple beam ellipsometer | Li Chen | 2006-11-14 |
| 7030984 | Fast wafer positioning method for optical metrology | Ilya Chizhov | 2006-04-18 |
| 6985228 | Multiple beam ellipsometer | Li Chen | 2006-01-10 |
| 6952261 | System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size | — | 2005-10-04 |
| 6952258 | Wafer chuck with integrated reference sample | Thomas Traber | 2005-10-04 |
| 6798512 | Multiple beam ellipsometer | Li Chen | 2004-09-28 |
| 6757059 | Wafer chuck with integrated reference sample | Thomas Traber | 2004-06-29 |
| 6747746 | System and method for finding the center of rotation of an R-theta stage | Ilya Chizhov | 2004-06-08 |