Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204826 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Martin Ebert, Pieter Jacob Mathias Hendrik Knelissen +5 more | 2025-01-21 |
| 11580274 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Martin Ebert, Pieter Jacob Mathias Hendrik Knelissen +5 more | 2023-02-14 |
| 11221560 | Method and apparatus for design of a metrology target | Wei-Cheng Liu, Maurits Van Der Schaar | 2022-01-11 |
| 10296692 | Method and apparatus for design of a metrology target | Justin Ghan, David Harold Whysong | 2019-05-21 |
| 10296681 | Process based metrology target design | Shufeng Bai, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy, Jen-Shiang Wang +3 more | 2019-05-21 |
| 10007744 | Process based metrology target design | Shufeng Bai, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy, Jen-Shiang Wang +3 more | 2018-06-26 |
| 9804504 | Method and apparatus for design of a metrology target | Eric Kent, Jen-Shiang Wang, Omer Abubaker Omer Adam | 2017-10-31 |
| 9494874 | Method and apparatus for design of a metrology target | Jen-Shiang Wang, Shufeng Bai | 2016-11-15 |
| 9355200 | Method and apparatus for design of a metrology target | Eric Kent, Jen-Shiang Wang, Omer Abubaker Omer Adam | 2016-05-31 |
| 7488933 | Method for lithography model calibration | Jun Ye, Yu Cao, Stefan Hunsche | 2009-02-10 |