Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204826 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Guangqing Chen, Martin Ebert, Pieter Jacob Mathias Hendrik Knelissen +5 more | 2025-01-21 |
| 11580274 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Guangqing Chen, Martin Ebert, Pieter Jacob Mathias Hendrik Knelissen +5 more | 2023-02-14 |
| 9470986 | Inspection methods, inspection apparatuses, and lithographic apparatuses | Andreas Fuchs, Maurits Van Der Schaar, Scott Anderson Middlebrooks | 2016-10-18 |
| 8749786 | Inspection method and apparatus, and corresponding lithographic apparatus | Andreas Fuchs, Maurits Van Der Schaar, Scott Anderson Middlebrooks | 2014-06-10 |