| 12429328 |
Metrology method, target and substrate |
Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more |
2025-09-30 |
| 11428521 |
Metrology method, target and substrate |
Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more |
2022-08-30 |
| 11204239 |
Metrology method, target and substrate |
Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more |
2021-12-21 |
| 10718604 |
Metrology method, target and substrate |
Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more |
2020-07-21 |
| 10386176 |
Metrology method, target and substrate |
Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more |
2019-08-20 |
| 9786044 |
Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method |
Peter Hanzen Wardenier, Amandev Singh, Maxime D'Alfonso, Hilko Dirk Bos |
2017-10-10 |
| 9594311 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Martyn John Coogans |
2017-03-14 |
| 9594310 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Martyn John Coogans |
2017-03-14 |
| 9515753 |
AM/FM antenna performance in the presence of wide-band noise using tunable high-Q structures |
Timothy J. Talty, Gregg R. Kittinger, Elias H. Ghafari |
2016-12-06 |
| 9470986 |
Inspection methods, inspection apparatuses, and lithographic apparatuses |
Maurits Van Der Schaar, Scott Anderson Middlebrooks, Panagiotis Pieter Bintevinos |
2016-10-18 |
| 9235141 |
Inspection apparatus and method for measuring a property of a substrate |
Maurits Van Der Schaar, Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Martyn John Coogans, Hendrik Jan Hidde Smilde |
2016-01-12 |
| 8908147 |
Method and apparatus for determining an overlay error |
Arie Jeffrey Den Boef, Maurits Van Der Schaar, Martyn John Coogans, Kaustuve Bhattacharyya, Stephen Morgan +1 more |
2014-12-09 |
| 8830128 |
Single feed multi-frequency multi-polarization antenna |
Elias H. Ghafari, Nikola Dobric |
2014-09-09 |
| 8786825 |
Apparatus and method of measuring a property of a substrate |
Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Martyn John Coogans |
2014-07-22 |
| 8760362 |
Single-feed multi-frequency multi-polarization antenna |
Elias H. Ghafari |
2014-06-24 |
| 8749786 |
Inspection method and apparatus, and corresponding lithographic apparatus |
Maurits Van Der Schaar, Scott Anderson Middlebrooks, Panagiotis Pieter Bintevinos |
2014-06-10 |
| 8724087 |
Inspection apparatus for lithography |
Marcus Adrianus Van De Kerkhof, Antoine Gaston Marie Kiers, Maurits Van Der Schaar, Leonardus Henricus Marie Verstappen, Scott Anderson Middlebrooks |
2014-05-13 |
| 8681052 |
Low profile wideband antenna |
Elias H. Ghafari |
2014-03-25 |
| 8665417 |
Apparatus and method for inspecting a substrate |
Maurits Van Der Schaar |
2014-03-04 |
| 8482466 |
Low profile antenna assemblies |
Cheikh T. Thiam, John V. Kowalewicz, Ralf Lindackers |
2013-07-09 |
| 8228238 |
Low profile antenna assemblies |
Cheikh T. Thiam, John V. Kowalewicz, Ralf Lindackers |
2012-07-24 |
| 8111196 |
Stacked patch antennas |
Cheikh T. Thiam, Ayman Duzdar, Chun Kit Lai |
2012-02-07 |
| 7755551 |
Modular antenna assembly for automotive vehicles |
Ralf Lindackers, Hasan Yasin, Ayman Duzdar |
2010-07-13 |
| 7528780 |
Stacked patch antennas |
Cheikh T. Thiam, Ayman Duzdar, Chun Kit Lai |
2009-05-05 |
| 7405700 |
Single-feed multi-frequency multi-polarization antenna |
Ayman Duzdar |
2008-07-29 |
