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Computational wafer inspection |
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2024-08-20 |
| 11428521 |
Metrology method, target and substrate |
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2022-08-30 |
| 11204239 |
Metrology method, target and substrate |
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2021-12-21 |
| 11080459 |
Computational wafer inspection |
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2021-08-03 |
| 10718604 |
Metrology method, target and substrate |
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2020-07-21 |
| 10579772 |
Computational wafer inspection |
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| 10386176 |
Metrology method, target and substrate |
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2019-08-20 |
| 9990462 |
Computational wafer inspection |
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2018-06-05 |
| 9710903 |
System and method for detecting design and process defects on a wafer using process monitoring features |
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2017-07-18 |
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Computational wafer inspection |
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2016-11-29 |
| 8175373 |
Use of design information and defect image information in defect classification |
Gordon Abbott, Ori Tadmor, Takuji Tada |
2012-05-08 |
| 7904845 |
Determining locations on a wafer to be reviewed during defect review |
Gordon Abbott, Ellis Chang, Zain Saidin |
2011-03-08 |
| 7747062 |
Methods, defect review tools, and systems for locating a defect in a defect review process |
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2010-06-29 |
| 7219069 |
System and method for creating dynamic facility models with data normalization as attributes change over time |
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2007-05-15 |