Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9710903 | System and method for detecting design and process defects on a wafer using process monitoring features | Christophe David Fouquet, Zain Saidin, Savitha Nanjangud, Carl Hess | 2017-07-18 |
| 8398832 | Coils for generating a plasma and for sputtering | Jaim Nulman, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2013-03-19 |
| 7893703 | Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer | Jeffrey Rzepiela, Yiping Feng, Shiyou Pei, Alexander Kagan, Jianou Shi | 2011-02-22 |
| 7719294 | Systems configured to perform a non-contact method for determining a property of a specimen | Amin Samsavar, John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller +3 more | 2010-05-18 |
| 7538333 | Contactless charge measurement of product wafers and control of corona generation and deposition | Amin Samsavar, John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller +3 more | 2009-05-26 |
| 7369233 | Optical system for measuring samples using short wavelength radiation | Mehrdad Nikoonahad, Shing Lee, Hidong Kwak, Guoheng Zhao, Gary Janik | 2008-05-06 |
| 7345306 | Corona based charge voltage measurement | Eric Bouche, Jianou Shi, Shiyou Pei, Xiafang Zhang | 2008-03-18 |
| 7248062 | Contactless charge measurement of product wafers and control of corona generation and deposition | Amin Samsavar, John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller +3 more | 2007-07-24 |
| 7098050 | Corona based charge voltage measurement | Eric Bouche, Jianou Shi, Shiyou Pei, Xiafang Zhang | 2006-08-29 |
| 6783639 | Coils for generating a plasma and for sputtering | Jaim Nulman, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2004-08-31 |
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Avi Tepman +2 more | 2003-08-05 |
| 6368469 | Coils for generating a plasma and for sputtering | Jaim Nulman, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2002-04-09 |
| 6350353 | Alternate steps of IMP and sputtering process to improve sidewall coverage | Praburam Gopalraja, Avi Tepman, Peijun Ding, Debabrata Ghosh, Nirmalya Maity | 2002-02-26 |
| 6290865 | Spin-rinse-drying process for electroplated semiconductor wafers | Mark Cassidy Cridlin Lloyd, Ashok Sinha, Michael Sugarman | 2001-09-18 |
| 6254746 | Recessed coil for generating a plasma | Anantha K. Subramani, John C. Forster, Bradley O. Stimson, Howard Grunes, Avi Tepman +1 more | 2001-07-03 |
| 6254737 | Active shield for generating a plasma for sputtering | Mani Subramani | 2001-07-03 |
| 5908334 | Electrical connector for power transmission in an electrostatic chuck | Aihua Chen, Vijay D. Parkhe | 1999-06-01 |
| 5796074 | Wafer heater assembly | Steven Chen, Vijay D. Parkhe | 1998-08-18 |
| 5691876 | High temperature polyimide electrostatic chuck | Aihua Chen, Vijay D. Parkhe | 1997-11-25 |
| 5650052 | Variable cell size collimator | Nitin Khurana, Keiji Miyamoto, Roderick C. Mosely, William J. Murphy, Vijay D. Parkhe +2 more | 1997-07-22 |