Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8853592 | Method for laser machining a sample having a crystalline structure | Marcus Straw, Milos Toth, Mark W. Utlaut | 2014-10-07 |
| 7719294 | Systems configured to perform a non-contact method for determining a property of a specimen | John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller, Zhiwei Xu +3 more | 2010-05-18 |
| 7538333 | Contactless charge measurement of product wafers and control of corona generation and deposition | John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller, Zhiwei Xu +3 more | 2009-05-26 |
| 7358748 | Methods and systems for determining a property of an insulating film | Thomas G. Miller, Gregory S. Horner, Zhiwei Xu, Patrick Stevens | 2008-04-15 |
| 7278301 | System for sensing a sample | Thomas H. McWaid, Peter G. Panagas, Steven Eaton, William R. Wheeler | 2007-10-09 |
| 7248062 | Contactless charge measurement of product wafers and control of corona generation and deposition | John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller, Zhiwei Xu +3 more | 2007-07-24 |
| 7100430 | Dual stage instrument for scanning a specimen | William R. Wheeler, Steven Eaton, Jian-Ping Zhuang | 2006-09-05 |
| 7012438 | Methods and systems for determining a property of an insulating film | Thomas G. Miller, Gregory S. Horner, Zhiwei Xu, Patrick Stevens | 2006-03-14 |
| 6931917 | System for sensing a sample | Thomas H. McWaid, Peter G. Panagas, Steven Eaton, William R. Wheeler | 2005-08-23 |
| 6794886 | Tank probe for measuring surface conductance | Dong Chen, John D. Alexander | 2004-09-21 |
| 6759255 | Method and system for detecting metal contamination on a semiconductor wafer | Zhiwei Xu, Arun Ramaswamy SRIVATSA, Thomas G. Miller, Greg Horner, Steven M. Weinzierl | 2004-07-06 |
| 6520005 | System for sensing a sample | Thomas H. McWaid, Peter G. Panagas, Steven Eaton, William R. Wheeler | 2003-02-18 |
| 6267005 | Dual stage instrument for scanning a specimen | William R. Wheeler, Steven Eaton, Jian-Ping Zhuang | 2001-07-31 |
| 5955661 | Optical profilometer combined with stylus probe measurement device | Michael Weber, Thomas H. McWaid, William P. Kuhn, Robert E. Parks | 1999-09-21 |
| 5948972 | Dual stage instrument for scanning a specimen | William R. Wheeler, Steven Eaton | 1999-09-07 |
| 5866806 | System for locating a feature of a surface | Jian-Ping Zhuang, Jason Schneir | 1999-02-02 |
| 5852232 | Acoustic sensor as proximity detector | Thomas H. McWaid, Sergey Yudin | 1998-12-22 |