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Method for removing oxides |
Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more |
2014-09-30 |
| 7767024 |
Method for front end of line fabrication |
Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more |
2010-08-03 |
| 7520957 |
Lid assembly for front end of line fabrication |
Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more |
2009-04-21 |
| 7396480 |
Method for front end of line fabrication |
Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more |
2008-07-08 |
| 7067045 |
Method and apparatus for sealing electrical contacts during an electrochemical deposition process |
Arthur Keigler, Harald Herchen, Vincent E. Burkhart |
2006-06-27 |
| 7025862 |
Plating uniformity control by contact ring shaping |
Harald Herchen, Henan Hao, Celina M. Esteban, Timothy Webb |
2006-04-11 |
| 6603269 |
Resonant chamber applicator for remote plasma source |
Be Van Vo, Salvador P. Umotoy, Lawrence Chung-Lai Lei, Sergio Edelstein, Avi Tepman +2 more |
2003-08-05 |
| 6461435 |
Showerhead with reduced contact area |
Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Chien-Teh Kao, Ken Kaung Lai +4 more |
2002-10-08 |
| 6375748 |
Method and apparatus for preventing edge deposition |
Joseph Yudovsky, Tom Madar, Salvador P. Umotoy, Lawrence Chung-Lai Lei, Anzhong Chang +1 more |
2002-04-23 |
| 6277199 |
Chamber design for modular manufacturing and flexible onsite servicing |
Lawrence Chung-Lai Lei |
2001-08-21 |
| 6050446 |
Pivoting lid assembly for a chamber |
Lawrence Chung-Lai Lei, Gwo-Chuan Tzu, Mark S. Johnson |
2000-04-18 |
| 5968276 |
Heat exchange passage connection |
Lawrence Chung-Lai Lei, Mark S. Johnson |
1999-10-19 |
