Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8846163 | Method for removing oxides | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2014-09-30 |
| 7767024 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2010-08-03 |
| 7520957 | Lid assembly for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2009-04-21 |
| 7396480 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2008-07-08 |
| 7067045 | Method and apparatus for sealing electrical contacts during an electrochemical deposition process | Arthur Keigler, Harald Herchen, Vincent E. Burkhart | 2006-06-27 |
| 7025862 | Plating uniformity control by contact ring shaping | Harald Herchen, Henan Hao, Celina M. Esteban, Timothy Webb | 2006-04-11 |
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Salvador P. Umotoy, Lawrence Chung-Lai Lei, Sergio Edelstein, Avi Tepman +2 more | 2003-08-05 |
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Chien-Teh Kao, Ken Kaung Lai +4 more | 2002-10-08 |
| 6375748 | Method and apparatus for preventing edge deposition | Joseph Yudovsky, Tom Madar, Salvador P. Umotoy, Lawrence Chung-Lai Lei, Anzhong Chang +1 more | 2002-04-23 |
| 6277199 | Chamber design for modular manufacturing and flexible onsite servicing | Lawrence Chung-Lai Lei | 2001-08-21 |
| 6050446 | Pivoting lid assembly for a chamber | Lawrence Chung-Lai Lei, Gwo-Chuan Tzu, Mark S. Johnson | 2000-04-18 |
| 5968276 | Heat exchange passage connection | Lawrence Chung-Lai Lei, Mark S. Johnson | 1999-10-19 |