Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942341 | Adaptive focusing and transport system for electroplating | David G. Guarnaccia, Freeman Fisher, Demetrius Papapanayiotou, Jonathan Haynes, Daniel Goodman | 2024-03-26 |
| 11887874 | Adaptive focusing and transport system for electroplating | David G. Guarnaccia, Freeman Fisher, Demetrius Papapanayiotou, Jonathan Haynes, Daniel Goodman | 2024-01-30 |
| 11608563 | Electrochemical deposition systems | Dave Guarnaccia, Demetrius Papapanaiyatou, Jon Hander, Robert Moon | 2023-03-21 |
| 11174544 | Batch processing system with vacuum isolation | Kevin Barbera, Daniel Goodman | 2021-11-16 |
| 10283396 | Workpiece holder for a wet processing system | David G. Guarnaccia | 2019-05-07 |
| 10074554 | Workpiece loader for a wet processing system | Freeman Fisher, Daniel Goodman | 2018-09-11 |
| 9988735 | Electrochemical deposition apparatus and methods for controlling the chemistry therein | Demetrius Papapanayiotou, Jonathan Hander, Johannes Chiu, David G. Guarnaccia, Daniel Goodman | 2018-06-05 |
| 9714474 | Seed layer deposition in microscale features | Johannes Chiu, Zhenqiu Liu, Daniel Goodman | 2017-07-25 |
| 9637836 | Electrochemical deposition apparatus and methods for controlling the chemistry therein | Demetrius Papapanayiotou, Jonathan Hander, Johannes Chiu, David G. Guarnaccia, Daniel Goodman | 2017-05-02 |
| 9508582 | Parallel single substrate marangoni module | Daniel Goodman, David G. Guarnaccia | 2016-11-29 |
| 9453290 | Apparatus for fluid processing a workpiece | John Harrell, Zhenqiu Liu, Qunwei Wu | 2016-09-27 |
| 9449862 | Parallel single substrate processing system | Freeman Fisher, Daniel Goodman | 2016-09-20 |
| 9421617 | Substrate holder | Daniel Goodman, David G. Guarnaccia | 2016-08-23 |
| 9303329 | Electrochemical deposition apparatus with remote catholyte fluid management | David G. Guarnaccia, Demetrius Papapanayiotou, Jonathan Hander | 2016-04-05 |
| 9293356 | Parallel single substrate processing system | Freeman Fisher, Daniel Goodman, Jonathan Haynes | 2016-03-22 |
| 9257319 | Parallel single substrate processing system with alignment features on a process section frame | — | 2016-02-09 |
| 9147588 | Substrate processing pallet with cooling | Daniel Goodman, Stephen N. Golovato, David Felsenthal | 2015-09-29 |
| 9117856 | Substrate loader and unloader having an air bearing support | Daniel Goodman, Freeman Fisher | 2015-08-25 |
| 9017528 | Electro chemical deposition and replenishment apparatus | Demetrius Papapanayiotou, David G. Guarnaccia, Jonathan Hander, Johannes Chiu | 2015-04-28 |
| 9005409 | Electro chemical deposition and replenishment apparatus | David G. Guarnaccia, Demetrius Papapanayiotou, Johannes Chiu | 2015-04-14 |
| 8967935 | Substrate loader and unloader | Daniel Goodman, Freeman Fisher | 2015-03-03 |
| 8858755 | Edge bevel removal apparatus and method | Daniel Goodman, Terry McElroy, Gary Boulet | 2014-10-14 |
| 8613474 | Substrate loader and unloader having a Bernoulli support | Daniel Goodman, Freeman Fisher, David G. Guarnaccia | 2013-12-24 |
| 8512543 | Method for fluid processing a workpiece | John Harrell, Zhenqiu Liu, Qunwei Wu | 2013-08-20 |
| 8425687 | Wetting a workpiece surface in a fluid-processing system | — | 2013-04-23 |