Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9147588 | Substrate processing pallet with cooling | Daniel Goodman, Arthur Keigler, Stephen N. Golovato | 2015-09-29 |
| 7100954 | Ultra-thin wafer handling system | Martin Klein, Arthur Keigler | 2006-09-05 |
| 6821912 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, Piero Sferlazzo | 2004-11-23 |
| 6682288 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, Piero Sferlazzo | 2004-01-27 |
| 6530733 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, Piero Sferlazzo | 2003-03-11 |
| 6328858 | Multi-layer sputter deposition apparatus | Chunghsin Lee, Piero Sferlazzo | 2001-12-11 |
| 6217272 | In-line sputter deposition system | Chunghsin Lee, Piero Sferlazzo | 2001-04-17 |