Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355864 | Method for increasing adhesion of copper to polymeric surfaces | Georgiy Seryogin, Thomas G. Tetreault, Ramya Chandrasekaran | 2016-05-31 |
| 9147588 | Substrate processing pallet with cooling | Daniel Goodman, Arthur Keigler, David Felsenthal | 2015-09-29 |
| 6779481 | Electrical coupling between chamber parts in electronic device processing equipment | Martin Kent, Abron Toure | 2004-08-24 |
| 6695318 | Electronic device processing equipment having contact gasket between chamber parts | Arthur Laflamme, Jay Wallace | 2004-02-24 |
| 6173673 | Method and apparatus for insulating a high power RF electrode through which plasma discharge gases are injected into a processing chamber | Robert W. Milgate, III, Paul Consoli | 2001-01-16 |
| 6143144 | Method for etch rate enhancement by background oxygen control in a soft etch system | Johannes F. M. Westendorp | 2000-11-07 |