Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7924547 | RuO0.8 electrode and structure | Steven R. Collins, Steven D. Bernstein | 2011-04-12 |
| 7709274 | Method for forming an RuOx electrode and structure | Steven R. Collins, Steven D. Bernstein | 2010-05-04 |
| 6779481 | Electrical coupling between chamber parts in electronic device processing equipment | Martin Kent, Stephen N. Golovato | 2004-08-24 |
| 6465359 | Etchant for use in a semiconductor processing method and system | Masahiro Yamada, Youbun Ito, Kouichiro Inazawa, Kunihiko Hinata, Hiromi Sakima | 2002-10-15 |
| 6159862 | Semiconductor processing method and system using C.sub.5 F.sub.8 | Masahiro Yamada, Youbun Ito, Kouichiro Inazawa, Kunihiko Hinata, Hiromi Sakima | 2000-12-12 |
| 5443688 | Method of manufacturing a ferroelectric device using a plasma etching process | Steven R. Collins, Bruce Leblanc | 1995-08-22 |