Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900129 | CVD of tantalum and tantalum nitride films from tantalum halide precursors | John Hautala | 2005-05-31 |
| 6413860 | PECVD of Ta films from tanatalum halide precursors | John Hautala | 2002-07-02 |
| 6410432 | CVD of integrated Ta and TaNx films from tantalum halide precursors | John Hautala | 2002-06-25 |
| 6410433 | Thermal CVD of TaN films from tantalum halide precursors | John Hautala | 2002-06-25 |
| 6268288 | Plasma treated thermal CVD of TaN films from tantalum halide precursors | John Hautala | 2001-07-31 |
| 6265311 | PECVD of TaN films from tantalum halide precursors | John Hautala | 2001-07-24 |
| 6143144 | Method for etch rate enhancement by background oxygen control in a soft etch system | Stephen N. Golovato | 2000-11-07 |
| 5167761 | Method for halide etching in the presence of water of semi-conductor substrates | Hans W. Piekaar | 1992-12-01 |