Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915906 | Wafer scanning apparatus and method for focused beam processing | Matthew C. Gwinn, Jerry Negrotti | 2024-02-27 |
| 11587760 | Wafer scanning apparatus and method for focused beam processing | Matthew C. Gwinn, Jerry Negrotti | 2023-02-21 |
| 6173673 | Method and apparatus for insulating a high power RF electrode through which plasma discharge gases are injected into a processing chamber | Stephen N. Golovato, Robert W. Milgate, III | 2001-01-16 |