| 11942341 |
Adaptive focusing and transport system for electroplating |
Arthur Keigler, David G. Guarnaccia, Freeman Fisher, Demetrius Papapanayiotou, Jonathan Haynes |
2024-03-26 |
| 11887874 |
Adaptive focusing and transport system for electroplating |
Arthur Keigler, David G. Guarnaccia, Freeman Fisher, Demetrius Papapanayiotou, Jonathan Haynes |
2024-01-30 |
| 11174544 |
Batch processing system with vacuum isolation |
Arthur Keigler, Kevin Barbera |
2021-11-16 |
| 10074554 |
Workpiece loader for a wet processing system |
Arthur Keigler, Freeman Fisher |
2018-09-11 |
| 9988735 |
Electrochemical deposition apparatus and methods for controlling the chemistry therein |
Demetrius Papapanayiotou, Arthur Keigler, Jonathan Hander, Johannes Chiu, David G. Guarnaccia |
2018-06-05 |
| 9714474 |
Seed layer deposition in microscale features |
Arthur Keigler, Johannes Chiu, Zhenqiu Liu |
2017-07-25 |
| 9637836 |
Electrochemical deposition apparatus and methods for controlling the chemistry therein |
Demetrius Papapanayiotou, Arthur Keigler, Jonathan Hander, Johannes Chiu, David G. Guarnaccia |
2017-05-02 |
| 9508582 |
Parallel single substrate marangoni module |
Arthur Keigler, David G. Guarnaccia |
2016-11-29 |
| 9449862 |
Parallel single substrate processing system |
Arthur Keigler, Freeman Fisher |
2016-09-20 |
| 9421617 |
Substrate holder |
Arthur Keigler, David G. Guarnaccia |
2016-08-23 |
| 9293356 |
Parallel single substrate processing system |
Arthur Keigler, Freeman Fisher, Jonathan Haynes |
2016-03-22 |
| 9147588 |
Substrate processing pallet with cooling |
Arthur Keigler, Stephen N. Golovato, David Felsenthal |
2015-09-29 |
| 9117856 |
Substrate loader and unloader having an air bearing support |
Arthur Keigler, Freeman Fisher |
2015-08-25 |
| 8967935 |
Substrate loader and unloader |
Arthur Keigler, Freeman Fisher |
2015-03-03 |
| 8858755 |
Edge bevel removal apparatus and method |
Arthur Keigler, Terry McElroy, Gary Boulet |
2014-10-14 |
| 8613474 |
Substrate loader and unloader having a Bernoulli support |
Arthur Keigler, Freeman Fisher, David G. Guarnaccia |
2013-12-24 |
| 8420981 |
Apparatus for thermal processing with micro-environment |
Arthur Keigler, David G. Guarnaccia, Matthew R. Jeffers |
2013-04-16 |
| 6110318 |
System for selective electron beam irradiation |
— |
2000-08-29 |
| 5997682 |
Phase-separated dual-cure elastomeric adhesive formulations and methods of using the same |
Catherine A. Byrne |
1999-12-07 |
| 5891292 |
Method of making fiber reinforced composites and coatings |
Guiseppe Raffaello Palmese |
1999-04-06 |
| 5659223 |
System for extracting a high power beam comprising air dynamic and foil windows |
— |
1997-08-19 |