Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728199 | Substrate support features and method of application | I-Kuan Lin, Arthur Wayne Sommerstein, Khanh Vo | 2023-08-15 |
| 11174544 | Batch processing system with vacuum isolation | Arthur Keigler, Daniel Goodman | 2021-11-16 |