Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084778 | Coatings for enhancement of properties and performance of substrate articles and apparatus | Bryan C. Hendrix, David Walter Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke +1 more | 2024-09-10 |
| 12018382 | Coatings for enhancement of properties and performance of substrate articles and apparatus | Bryan C. Hendrix, David Walter Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke +1 more | 2024-06-25 |
| 11728199 | Substrate support features and method of application | Arthur Wayne Sommerstein, Khanh Vo, Kevin Barbera | 2023-08-15 |
| 11713504 | Chemical resistant multi-layer coatings applied by atomic layer deposition | Carlo Waldfried, Chandrasekaran Venkatraman | 2023-08-01 |
| 11390943 | Chemical resistant multi-layer coatings applied by atomic layer deposition | Chandrasekaran Venkatraman, Carlo Waldfried | 2022-07-19 |
| 10961617 | Articles coated with fluoro-annealed films | Nilesh Gunda, Dennis Radgowski, Chandra Venkatraman | 2021-03-30 |
| 10770330 | Wafer contact surface protrusion profile with improved particle performance | John Michael Glasko, Carlo Waldfried | 2020-09-08 |
| 10734270 | Vacuum chuck with polymeric embossments | John Michael Glasko, Richard A. Cooke | 2020-08-04 |
| 10385454 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, Julian G. Blake, Lyudmila Stone | 2019-08-20 |
| 9721821 | Electrostatic chuck with photo-patternable soft protrusion contact surface | Richard A. Cooke, Jakub Rybczynski | 2017-08-01 |
| 9644269 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, Julian G. Blake, Lyudmila Stone | 2017-05-09 |
| 8861170 | Electrostatic chuck with photo-patternable soft protrusion contact surface | Richard A. Cooke, Jakub Rybczynski | 2014-10-14 |