Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322634 | Electrostatic chuck prepared by additive manufacturing, and related methods and structures | Chandra Venkatraman, Scott Sirignano, Yan Liu, Subhash Guddati, Thines Kumar Perumal +2 more | 2025-06-03 |
| 11837492 | Electrostatic chuck having a gas flow feature, and related methods | Yan Liu, Steven Donnell, Caleb Minsky, Chun Wang Chan | 2023-12-05 |
| 11742781 | Electrostatic chuck with charge dissipation coating | Yan Liu, Steven Donnell, Chun Wang Chan | 2023-08-29 |
| 11612972 | Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods | Yan Liu, Steven Donnell, Chun Wang Chan, Caleb Minsky | 2023-03-28 |
| 11417557 | Spiraling polyphase electrodes for electrostatic chuck | Chun Wang Chan, Yan Liu | 2022-08-16 |
| 11309207 | Grounding mechanism for multi-layer for electrostatic chuck, and related methods | Steven Donnell, Chun Wang Chan, Yan Liu | 2022-04-19 |
| 10497598 | Electrostatic chuck and method of making same | Richard A. Cooke, Wolfram Neff, Carlo Waldfried, Michael J. Hanagan, Wade A. Krull | 2019-12-03 |
| 9721821 | Electrostatic chuck with photo-patternable soft protrusion contact surface | I-Kuan Lin, Richard A. Cooke | 2017-08-01 |
| 8861170 | Electrostatic chuck with photo-patternable soft protrusion contact surface | I-Kuan Lin, Richard A. Cooke | 2014-10-14 |
| 8431816 | Apparatus and methods for solar energy conversion using nanoscale cometal structures | Krzysztof Kempa, Michael J. Naughton, Zhifeng Ren | 2013-04-30 |
| 7943847 | Apparatus and methods for solar energy conversion using nanoscale cometal structures | Krzysztof Kempa, Michael J. Naughton, Zhifeng Ren | 2011-05-17 |
| 7754964 | Apparatus and methods for solar energy conversion using nanocoax structures | Krysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Yang Wang | 2010-07-13 |
| 7649665 | Apparatus and methods for optical switching using nanoscale optics | Krzysztof Kempa, Zhifeng Ren, Michael J. Naughton | 2010-01-19 |
| 7634162 | Apparatus and methods for nanolithography using nanoscale optics | Krzysztof Kempa, Michael J. Naughton, Zhifeng Ren | 2009-12-15 |
| 7589880 | Apparatus and methods for manipulating light using nanoscale cometal structures | Krzysztof Kempa, Michael J. Naughton, Zhifeng Ren | 2009-09-15 |