Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497598 | Electrostatic chuck and method of making same | Richard A. Cooke, Wolfram Neff, Carlo Waldfried, Jakub Rybczynski, Michael J. Hanagan | 2019-12-03 |
| 8530343 | System and method for the manufacture of semiconductor devices by the implantation of carbon clusters | Thomas N. Horsky | 2013-09-10 |
| 8368309 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Dale C. Jacobson | 2013-02-05 |
| 8236675 | Semiconductor device and method of fabricating a semiconductor device | Dale C. Jacobson | 2012-08-07 |
| 8097529 | System and method for the manufacture of semiconductor devices by the implantation of carbon clusters | Thomas N. Horsky | 2012-01-17 |
| 7994031 | Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions | Thomas N. Horsky, Dale C. Jacobson | 2011-08-09 |
| 7919402 | Cluster ion implantation for defect engineering | Dale C. Jacobson, Thomas N. Horsky, Karuppanan Sekar | 2011-04-05 |
| 7820981 | Method and apparatus for extending equipment uptime in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Dale C. Jacobson | 2010-10-26 |
| 7791047 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Dale C. Jacobson | 2010-09-07 |
| 7723233 | Semiconductor device and method of fabricating a semiconductor device | Dale C. Jacobson | 2010-05-25 |
| 7666771 | System and method for the manufacture of semiconductor devices by the implantation of carbon clusters | Thomas N. Horsky | 2010-02-23 |
| 7629590 | Method and apparatus for extending equipment uptime in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Dale C. Jacobson | 2009-12-08 |
| 7609003 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, George Sacco | 2009-10-27 |
| 7528550 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, George Sacco | 2009-05-05 |
| 7394202 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, George Sacco | 2008-07-01 |
| 7064491 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, George Sacco | 2006-06-20 |
| 5998798 | Ion dosage measurement apparatus for an ion beam implanter and method | Alfred Mike Halling | 1999-12-07 |