Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8618514 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Thomas N. Horsky | 2013-12-31 |
| 8436326 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Thomas N. Horsky, Sami K. Hahto, Masao Naito, Nobuo Nagai +1 more | 2013-05-07 |
| 8410459 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Thomas N. Horsky | 2013-04-02 |
| 8368309 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Wade A. Krull | 2013-02-05 |
| 8236675 | Semiconductor device and method of fabricating a semiconductor device | Wade A. Krull | 2012-08-07 |
| 8110820 | Ion beam apparatus and method for ion implantation | Hilton F. Glavish, Sami K. Hahto, Thomas N. Horsky | 2012-02-07 |
| 8071958 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Thomas N. Horsky | 2011-12-06 |
| 7994031 | Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions | Thomas N. Horsky, Wade A. Krull | 2011-08-09 |
| 7960709 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Thomas N. Horsky | 2011-06-14 |
| 7919402 | Cluster ion implantation for defect engineering | Thomas N. Horsky, Wade A. Krull, Karuppanan Sekar | 2011-04-05 |
| 7851773 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Thomas N. Horsky, Sami K. Hahto, Masao Naito, Nobuo Nagai +1 more | 2010-12-14 |
| 7820981 | Method and apparatus for extending equipment uptime in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Wade A. Krull | 2010-10-26 |
| 7791047 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Wade A. Krull | 2010-09-07 |
| 7723233 | Semiconductor device and method of fabricating a semiconductor device | Wade A. Krull | 2010-05-25 |
| 7629590 | Method and apparatus for extending equipment uptime in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, George Sacco, Wade A. Krull | 2009-12-08 |
| 7491953 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Thomas N. Horsky | 2009-02-17 |
| 6544431 | Thin film lithium niobate structure and method of making the same | Douglas M. Gill | 2003-04-08 |
| 6172791 | Electro-optic modulators | Douglas M. Gill, Raymond Wolfe | 2001-01-09 |
| 5631490 | Metal semiconductor metal photodetectors | Niloy K. Dutta, Doyle T. Nichols | 1997-05-20 |
| 5249195 | Erbium doped optical devices | Leonard C. Feldman, Neil Hunt, John M. Poate, Erdmann F. Schubert, Arjen Maarten Vredenberg +2 more | 1993-09-28 |
| 5107538 | Optical waveguide system comprising a rare-earth Si-based optical device | Janet L. Benton, Lionel C. Kimerling, Jurgen Michel, John M. Poate | 1992-04-21 |
| 5039190 | Apparatus comprising an optical gain device, and method of producing the device | Greg E. Blonder, Rodney Kistler, John M. Poate, Albert Polman | 1991-08-13 |
| 4555301 | Formation of heterostructures by pulsed melting of precursor material | John M. Gibson, John M. Poate, Raymond T. Tung | 1985-11-26 |