Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865422 | Plasma generator with at least one non-metallic component | Sami K. Hahto | 2018-01-09 |
| 8994272 | Ion source having at least one electron gun comprising a gas inlet and a plasma region defined by an anode and a ground element thereof | Sami K. Hahto | 2015-03-31 |
| 8618514 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Dale C. Jacobson | 2013-12-31 |
| 8586459 | Ion implantation with molecular ions containing phosphorus and arsenic | Erin Dyker, Brian Bernstein, Dennis Keith Manning | 2013-11-19 |
| 8530343 | System and method for the manufacture of semiconductor devices by the implantation of carbon clusters | Wade A. Krull | 2013-09-10 |
| 8502161 | External cathode ion source | Sami K. Hahto, Richard Goldberg, Edward K. McIntyre | 2013-08-06 |
| 8436326 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Dale C. Jacobson, Sami K. Hahto, Masao Naito, Nobuo Nagai +1 more | 2013-05-07 |
| 8410459 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Dale C. Jacobson | 2013-04-02 |
| 8368309 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Robert W. Milgate, III, George Sacco, Dale C. Jacobson, Wade A. Krull | 2013-02-05 |
| 8330118 | Multi mode ion source | Richard Goldberg, Sami K. Hahto | 2012-12-11 |
| 8154210 | Ion implantation ion source, system and method | John Williams | 2012-04-10 |
| 8110820 | Ion beam apparatus and method for ion implantation | Hilton F. Glavish, Dale C. Jacobson, Sami K. Hahto | 2012-02-07 |
| 8097529 | System and method for the manufacture of semiconductor devices by the implantation of carbon clusters | Wade A. Krull | 2012-01-17 |
| 8071958 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Dale C. Jacobson | 2011-12-06 |
| 7994031 | Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions | Dale C. Jacobson, Wade A. Krull | 2011-08-09 |
| 7960709 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Dale C. Jacobson | 2011-06-14 |
| 7928406 | Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system) | Sami K. Hahto | 2011-04-19 |
| 7919402 | Cluster ion implantation for defect engineering | Dale C. Jacobson, Wade A. Krull, Karuppanan Sekar | 2011-04-05 |
| 7851773 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Dale C. Jacobson, Sami K. Hahto, Masao Naito, Nobuo Nagai +1 more | 2010-12-14 |
| 7838850 | External cathode ion source | Sami K. Hahto, Richard Goldberg, Edward K. McIntyre | 2010-11-23 |
| 7838842 | Dual mode ion source for ion implantation | — | 2010-11-23 |
| 7834554 | Dual mode ion source for ion implantation | — | 2010-11-16 |
| 7820981 | Method and apparatus for extending equipment uptime in ion implantation | Robert W. Milgate, III, George Sacco, Dale C. Jacobson, Wade A. Krull | 2010-10-26 |
| 7800312 | Dual mode ion source for ion implantation | — | 2010-09-21 |
| 7791047 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Robert W. Milgate, III, George Sacco, Dale C. Jacobson, Wade A. Krull | 2010-09-07 |