Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732787 | Ion implantation ion source, system and method | — | 2010-06-08 |
| 7723700 | Controlling the flow of vapors sublimated from solids | Robert W. Milgate, III | 2010-05-25 |
| 7666771 | System and method for the manufacture of semiconductor devices by the implantation of carbon clusters | Wade A. Krull | 2010-02-23 |
| 7629590 | Method and apparatus for extending equipment uptime in ion implantation | Robert W. Milgate, III, George Sacco, Dale C. Jacobson, Wade A. Krull | 2009-12-08 |
| 7609003 | Ion implantation system and control method | Brian C. Cohen, Wade A. Krull, George Sacco | 2009-10-27 |
| 7528550 | Ion implantation system and control method | Brian C. Cohen, Wade A. Krull, George Sacco | 2009-05-05 |
| 7491953 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Dale C. Jacobson | 2009-02-17 |
| 7479643 | Ion implantation ion source, system and method | — | 2009-01-20 |
| 7394202 | Ion implantation system and control method | Brian C. Cohen, Wade A. Krull, George Sacco | 2008-07-01 |
| 7185602 | Ion implantation ion source, system and method | John Williams | 2007-03-06 |
| 7112804 | Ion implantation ion source, system and method | John Williams | 2006-09-26 |
| 7107929 | Ion implantation ion source, system and method | John Williams | 2006-09-19 |
| 7064491 | Ion implantation system and control method | Brian C. Cohen, Wade A. Krull, George Sacco | 2006-06-20 |
| 7023138 | Electron impact ion source | — | 2006-04-04 |
| 7022999 | Ion implantation ion source, system and method | John Williams | 2006-04-04 |
| 6958481 | Decaborane ion source | Alexander S. Perel, William K. Loizides | 2005-10-25 |
| 6768121 | Ion source having replaceable and sputterable solid source material | Tommy D. Hollingsworth | 2004-07-27 |
| 6744214 | Electron beam ion source with integral low-temperature vaporizer | — | 2004-06-01 |
| 6686595 | Electron impact ion source | — | 2004-02-03 |
| 6583544 | Ion source having replaceable and sputterable solid source material | Tommy D. Hollingsworth | 2003-06-24 |
| 6452338 | Electron beam ion source with integral low-temperature vaporizer | — | 2002-09-17 |
| 6288403 | Decaborane ionizer | Alexander S. Perel, William K. Loizides | 2001-09-11 |
| 5471341 | Membrane light modulating systems | Cardinal Warde, Craig M. Schiller, George J. Genetti | 1995-11-28 |
| 5287215 | Membrane light modulation systems | Cardinal Warde, Craig M. Schiller, George J. Genetti | 1994-02-15 |