Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12328807 | Vaporizer, ion source and method for generating aluminum-containing vapor | Michael Crovo, Sami K. Hahto | 2025-06-10 |
| 12112915 | Vaporizer, ion source and method for generating aluminum-containing vapor | Sami K. Hahto | 2024-10-08 |
| 11017974 | Ion source | Sami K. Hahto | 2021-05-25 |
| 10153134 | Plasma generation system | Sami K. Hahto, Matthew C. Farrell | 2018-12-11 |
| 8368309 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, Dale C. Jacobson, Wade A. Krull | 2013-02-05 |
| 7820981 | Method and apparatus for extending equipment uptime in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, Dale C. Jacobson, Wade A. Krull | 2010-10-26 |
| 7791047 | Method and apparatus for extracting ions from an ion source for use in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, Dale C. Jacobson, Wade A. Krull | 2010-09-07 |
| 7629590 | Method and apparatus for extending equipment uptime in ion implantation | Thomas N. Horsky, Robert W. Milgate, III, Dale C. Jacobson, Wade A. Krull | 2009-12-08 |
| 7609003 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, Wade A. Krull | 2009-10-27 |
| 7528550 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, Wade A. Krull | 2009-05-05 |
| 7394202 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, Wade A. Krull | 2008-07-01 |
| 7064491 | Ion implantation system and control method | Thomas N. Horsky, Brian C. Cohen, Wade A. Krull | 2006-06-20 |
| 5929450 | High temperature gas stream optical flame sensor and method for fabricating same | William M. Glasheen, Deidre E. Cusack, Helmar R. Steglich | 1999-07-27 |
| 5763888 | High temperature gas stream optical flame sensor and method for fabricating same | William M. Glasheen, Deidre E. Cusack, Helmar R. Steglich | 1998-06-09 |
| 5670784 | High temperature gas stream optical flame sensor | Diedre E. Cusack, William M. Glasheen, Helmar R. Steglich | 1997-09-23 |