Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12328807 | Vaporizer, ion source and method for generating aluminum-containing vapor | George Sacco, Michael Crovo | 2025-06-10 |
| 12112915 | Vaporizer, ion source and method for generating aluminum-containing vapor | George Sacco | 2024-10-08 |
| 11017974 | Ion source | George Sacco | 2021-05-25 |
| 10153134 | Plasma generation system | George Sacco, Matthew C. Farrell | 2018-12-11 |
| 9865422 | Plasma generator with at least one non-metallic component | Thomas N. Horsky | 2018-01-09 |
| 9734982 | Beam current density distribution adjustment device and ion implanter | Tetsuro Yamamoto | 2017-08-15 |
| 9502213 | Ion beam line | Tetsuro Yamamoto | 2016-11-22 |
| 9275819 | Magnetic field sources for an ion source | Nariaki Hamamoto | 2016-03-01 |
| 9142386 | Ion beam line | Nariaki Hamamoto, Tetsuya Igo | 2015-09-22 |
| 8994272 | Ion source having at least one electron gun comprising a gas inlet and a plasma region defined by an anode and a ground element thereof | Thomas N. Horsky | 2015-03-31 |
| 8502161 | External cathode ion source | Richard Goldberg, Edward K. McIntyre, Thomas N. Horsky | 2013-08-06 |
| 8436326 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Thomas N. Horsky, Dale C. Jacobson, Masao Naito, Nobuo Nagai +1 more | 2013-05-07 |
| 8330118 | Multi mode ion source | Thomas N. Horsky, Richard Goldberg | 2012-12-11 |
| 8110820 | Ion beam apparatus and method for ion implantation | Hilton F. Glavish, Dale C. Jacobson, Thomas N. Horsky | 2012-02-07 |
| 7928406 | Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system) | Thomas N. Horsky | 2011-04-19 |
| 7851773 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Thomas N. Horsky, Dale C. Jacobson, Masao Naito, Nobuo Nagai +1 more | 2010-12-14 |
| 7838850 | External cathode ion source | Richard Goldberg, Edward K. McIntyre, Thomas N. Horsky | 2010-11-23 |
| 7176469 | Negative ion source with external RF antenna | Ka-Ngo Leung, Sari T. Hahto | 2007-02-13 |