Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275819 | Magnetic field sources for an ion source | Sami K. Hahto | 2016-03-01 |
| 9142386 | Ion beam line | Sami K. Hahto, Tetsuya Igo | 2015-09-22 |
| 8436326 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Thomas N. Horsky, Dale C. Jacobson, Sami K. Hahto, Masao Naito +1 more | 2013-05-07 |
| 7851773 | Ion beam apparatus and method employing magnetic scanning | Hilton F. Glavish, Thomas N. Horsky, Dale C. Jacobson, Sami K. Hahto, Masao Naito +1 more | 2010-12-14 |
| 7750313 | Ion source | Hideki Fujita, Sei Umisedo | 2010-07-06 |
| 7655929 | Ion beam measuring method and ion implanting apparatus | Sei Umisedo, Tadashi Ikejiri, Kohei Tanaka | 2010-02-02 |
| 7368734 | Ion beam measuring method and ion implanting apparatus | Sei Umisedo | 2008-05-06 |
| 7365339 | Ion source | Hideki Fujita, Sei Umisedo | 2008-04-29 |
| 7087912 | Ion beam irradiation apparatus for suppressing charge up of substrate and method for the same | — | 2006-08-08 |
| 6686599 | Ion production device for ion beam irradiation apparatus | Shigeki Sakai | 2004-02-03 |
| 6548381 | Ion beam irradiation apparatus and method of igniting a plasma for the same | — | 2003-04-15 |
| 6495840 | Ion-implanting method and ion-implanting apparatus | Takao Matsumoto | 2002-12-17 |