Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8702920 | Repeller structure and ion source | Tetsuya Igo, Takatoshi Yamashita | 2014-04-22 |
| 8389964 | Ion implanting apparatus and deflecting electrode | Tetsuya Igo, Takatoshi Yamashita | 2013-03-05 |
| 8253114 | Ion source | Takatoshi Yamashita, Tetsuya Igo | 2012-08-28 |
| 7791041 | Ion source, ion implantation apparatus, and ion implantation method | Takatoshi Yamashita, Keiko Kuzawa, Hideyuki Fujiwara | 2010-09-07 |
| 7772573 | Ion implanting apparatus and method of correcting beam orbit | Tetsuya Igo, Takatoshi Yamashita | 2010-08-10 |
| 7755062 | Ion source and ion implantation apparatus | Takatoshi Yamashita | 2010-07-13 |
| 7655929 | Ion beam measuring method and ion implanting apparatus | Sei Umisedo, Nariaki Hamamoto, Kohei Tanaka | 2010-02-02 |
| 7635850 | Ion implanter | Takatoshi Yamashita, Kohei Tanaka, Weijiang Zhao, Hideyuki Tanaka | 2009-12-22 |
| 7541601 | Ion beam irradiating apparatus and method of adjusting uniformity of a beam | — | 2009-06-02 |
| 6651582 | Method and device for irradiating an ion beam, and related method and device thereof | Shigeki Sakai | 2003-11-25 |