Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7791041 | Ion source, ion implantation apparatus, and ion implantation method | Takatoshi Yamashita, Tadashi Ikejiri, Hideyuki Fujiwara | 2010-09-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7791041 | Ion source, ion implantation apparatus, and ion implantation method | Takatoshi Yamashita, Tadashi Ikejiri, Hideyuki Fujiwara | 2010-09-07 |