Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340974 | Hydrogen supply device, and ion beam irradiation apparatus equipped therewith | Yuya HIRAI, Suguru ITOI, Yuta IWANAMI | 2025-06-24 |
| 12272588 | Wafer clamping method and semiconductor manufacturing apparatus | Takayuki Murayama, Yuya HIRAI | 2025-04-08 |
| 11749501 | Ion implantation apparatus | Jian Wang, Shinsuke Inoue, Yuta IWANAMI, Takashi Sakamoto | 2023-09-05 |
| 10600608 | Ion source | Masakazu Adachi, Shigeki Sakai, Yuya HIRAI, Takayuki Murayama, Tomoya Taniguchi | 2020-03-24 |
| 9601359 | Substrate holding device, semiconductor fabrication device, and substrate clamping ascertainment method | Kazuki Tobikawa | 2017-03-21 |
| 7635850 | Ion implanter | Takatoshi Yamashita, Tadashi Ikejiri, Kohei Tanaka, Hideyuki Tanaka | 2009-12-22 |