Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272588 | Wafer clamping method and semiconductor manufacturing apparatus | Yuya HIRAI, Weijiang Zhao | 2025-04-08 |
| 10600608 | Ion source | Masakazu Adachi, Shigeki Sakai, Yuya HIRAI, Tomoya Taniguchi, Weijiang Zhao | 2020-03-24 |
| 5067904 | IC socket | Shigeru Takeuchi, Motokuni Horiguchi, Masami Hukunaga | 1991-11-26 |