Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340974 | Hydrogen supply device, and ion beam irradiation apparatus equipped therewith | Weijiang Zhao, Suguru ITOI, Yuta IWANAMI | 2025-06-24 |
| 12272588 | Wafer clamping method and semiconductor manufacturing apparatus | Takayuki Murayama, Weijiang Zhao | 2025-04-08 |
| 11565281 | Method for forming multilayer coating film | Nobuhiko NARITA, Hirokazu Okazaki, Tatsuo Kuramochi, Takakazu Yamane, Keiichi Okamoto +2 more | 2023-01-31 |
| 10971339 | Ion source and cleaning method thereof | Masakazu Adachi, Tomoya Taniguchi | 2021-04-06 |
| 10600608 | Ion source | Masakazu Adachi, Shigeki Sakai, Takayuki Murayama, Tomoya Taniguchi, Weijiang Zhao | 2020-03-24 |