Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1051838 | Single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Graham Wright +6 more | 2024-11-19 |
| 11810746 | Variable thickness ion source extraction plate | Alexandre Likhanskii, Jay T. Scheuer, Bon-Woong Koo, Robert C. Lindberg, Peter F. Kurunczi +1 more | 2023-11-07 |
| 11631567 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Graham Wright +6 more | 2023-04-18 |
| 11251010 | Shaped repeller for an indirectly heated cathode ion source | Jay Johnson, Suren Madunts, Adam M. McLaughlin, Graham Wright | 2022-02-15 |
| 11127557 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Graham Wright +6 more | 2021-09-21 |
| 10896799 | Ion source with multiple configurations | Klaus Becker, Carlos M. Goulart, Daniel Alvarado, Daniel R. Tieger | 2021-01-19 |
| 10818469 | Cylindrical shaped arc chamber for indirectly heated cathode ion source | Jay T. Scheuer, Graham Wright | 2020-10-27 |
| 10347457 | Dynamic temperature control of an ion source | David Sporleder, Adam M. McLaughlin, Craig R. Chaney, Neil J. Bassom | 2019-07-09 |
| 10290461 | Ion source for enhanced ionization | Daniel R. Tieger, Klaus Becker, Daniel Alvarado | 2019-05-14 |
| 9824846 | Dual material repeller | William Davis Lee, David Sporleder | 2017-11-21 |
| 9142379 | Ion source and a method for in-situ cleaning thereof | Bon-Woong Koo, Christopher Campbell, Craig R. Chaney, Robert C. Lindberg, Wilhelm P. Platow | 2015-09-22 |
| 9076625 | Indirectly heated cathode cartridge design | Craig R. Chaney, Leo V. Klos, Anthony Renau | 2015-07-07 |
| 8937003 | Technique for ion implanting a target | Craig R. Chaney, Wayne LeBlanc, Robert C. Lindberg, Antonella Cucchetti, Neil J. Bassom +2 more | 2015-01-20 |
| 8809800 | Ion source and a method for in-situ cleaning thereof | Bon-Woong Koo, Christopher Campbell, Craig R. Chaney, Robert C. Lindberg, Wilhelm P. Platow | 2014-08-19 |
| 8455839 | Cleaning of an extraction aperture of an ion source | Craig R. Chaney, Neil J. Bassom, Leo V. Klos | 2013-06-04 |
| 8330127 | Flexible ion source | Russell J. Low, Jay T. Scheuer, Craig R. Chaney, Neil J. Bassom | 2012-12-11 |
| 8263944 | Directional gas injection for an ion source cathode assembly | John Bon-Woong Koo, David J. Twiss, Chris Campbell, Frank Sinclair, Craig R. Chaney +2 more | 2012-09-11 |
| 8142607 | High density helicon plasma source for wide ribbon ion beam generation | Costel Biloiu, Jay T. Scheuer | 2012-03-27 |
| 8071956 | Cleaning of an extraction aperture of an ion source | Craig R. Chaney, Leo V. Klos | 2011-12-06 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Neil J. Bassom, Peter F. Kurunczi, Craig R. Chaney | 2011-08-23 |
| 8003957 | Ethane implantation with a dilution gas | Craig R. Chaney, Adolph R. Dori, Christopher R. Hatem | 2011-08-23 |
| 7999479 | Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control | Costel Biloiu, Jay T. Scheuer | 2011-08-16 |
| 7767986 | Method and apparatus for controlling beam current uniformity in an ion implanter | Rajesh Dorai, Peter F. Kurunczi, Wilhelm P. Platow | 2010-08-03 |
| 7723697 | Techniques for optical ion beam metrology | Wilhelm P. Platow, Craig R. Chaney, Frank Sinclair, Tyler Rockwell | 2010-05-25 |
| 7598495 | Methods and systems for trapping ion beam particles and focusing an ion beam | Peter L. Kellerman, Victor M. Benveniste, Brian S. Freer, Michael Graf | 2009-10-06 |