Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7586109 | Technique for improving the performance and extending the lifetime of an ion source with gas dilution | Craig R. Chaney | 2009-09-08 |
| 7459704 | Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms | Joseph C. Olson, Anthony Renau, Donna L. Smatlak, Kurt Deckerlucke, Paul J. Murphy +2 more | 2008-12-02 |
| 7435977 | Ion beam angle measurement systems and methods for ion implantation systems | Brian S. Freer | 2008-10-14 |
| 7423277 | Ion beam monitoring in an ion implanter using an imaging device | Phil J. Ring, Ronald A. Capodilupo, Michael Graf | 2008-09-09 |
| 7205556 | Bellows liner for an ion beam implanter | Lyudmila Stone, Scott Barusso, Dale K. Stone | 2007-04-17 |
| 7078712 | In-situ monitoring on an ion implanter | Lyudmila Stone, William K. Loizides, Victor M. Benveniste | 2006-07-18 |
| 6992311 | In-situ cleaning of beam defining apertures in an ion implanter | Philip J. Ring | 2006-01-31 |
| 6958481 | Decaborane ion source | Thomas N. Horsky, William K. Loizides | 2005-10-25 |
| 6479828 | Method and system for icosaborane implantation | — | 2002-11-12 |
| 6288403 | Decaborane ionizer | Thomas N. Horsky, William K. Loizides | 2001-09-11 |