| 10861674 |
Compensated location specific processing apparatus and method |
Matthew C. Gwinn, Martin D. Tabat, Kenneth Regan, Allen J. Leith |
2020-12-08 |
|
| 10497540 |
Compensated location specific processing apparatus and method |
Matthew C. Gwinn, Martin D. Tabat, Kenneth Regan, Allen J. Leith |
2019-12-03 |
|
| 9735019 |
Process gas enhancement for beam treatment of a substrate |
Noel Russell, Matthew C. Gwinn, Allen J. Leith |
2017-08-15 |
|
| 9103031 |
Method and system for growing a thin film using a gas cluster ion beam |
John Hautala, Yan Shao, Brian S. Freer |
2015-08-11 |
|
| 8981322 |
Multiple nozzle gas cluster ion beam system |
Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Avrum Freytsis |
2015-03-17 |
|
| 8803110 |
Methods for beam current modulation by ion source parameter modulation |
Edward C. Eisner, William F. DiVergilio, Daniel R. Tieger |
2014-08-12 |
$1,895,000 |
| 8691700 |
Gas cluster ion beam etch profile control using beam divergence |
John Hautala |
2014-04-08 |
|
| 8338806 |
Gas cluster ion beam system with rapid gas switching apparatus |
Robert K. Becker, Christopher T. Reddy, Noel Russell |
2012-12-25 |
|
| 8304033 |
Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles |
Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Avrum Freytsis |
2012-11-06 |
|
| 8193513 |
Hybrid ion source/multimode ion source |
William F. DiVergilio, Daniel R. Tieger |
2012-06-05 |
$1,700,000 |
| 8173980 |
Gas cluster ion beam system with cleaning apparatus |
Andrej Mitrovic |
2012-05-08 |
|
| 8097860 |
Multiple nozzle gas cluster ion beam processing system and method of operating |
Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Avrum Freytsis |
2012-01-17 |
|
| 8089052 |
Ion source with adjustable aperture |
Daniel R. Tieger, William F. DiVergilio, Edward C. Eisner |
2012-01-03 |
$2,489,000 |
| 7750320 |
System and method for two-dimensional beam scan across a workpiece of an ion implanter |
Joseph Ferrara, Bo H. Vanderberg |
2010-07-06 |
$796,000 |
| 7701230 |
Method and system for ion beam profiling |
John Zheng Ye, Michael Cristoforo, Yongzhang Huang, Bo H. Vanderberg |
2010-04-20 |
$2,625,000 |
| 7598495 |
Methods and systems for trapping ion beam particles and focusing an ion beam |
Peter L. Kellerman, Victor M. Benveniste, Alexander S. Perel, Brian S. Freer |
2009-10-06 |
$2,880,000 |
| 7589333 |
Methods for rapidly switching off an ion beam |
Edward C. Eisner, William F. DiVergilio, Daniel R. Tieger |
2009-09-15 |
$3,673,000 |
| 7557363 |
Closed loop dose control for ion implantation |
Yongzhang Huang, Brian S. Freer, John Zheng Ye, Christopher Godfrey, Patrick Splinter |
2009-07-07 |
$1,796,000 |
| 7423277 |
Ion beam monitoring in an ion implanter using an imaging device |
Alexander S. Perel, Phil J. Ring, Ronald A. Capodilupo |
2008-09-09 |
$2,666,000 |
| 7375355 |
Ribbon beam ion implanter cluster tool |
Joseph Ferrara, Patrick Splinter, Victor M. Benveniste |
2008-05-20 |
$6,684,000 |
| 7358508 |
Ion implanter with contaminant collecting surface |
Philip J. Ring |
2008-04-15 |
$6,714,000 |
| 6992310 |
Scanning systems and methods for providing ions from an ion beam to a workpiece |
Joseph Ferrara, Bo H. Vanderberg |
2006-01-31 |
$1,772,000 |
| 6992308 |
Modulating ion beam current |
Andrew M. Ray |
2006-01-31 |
$1,772,000 |
| 6953942 |
Ion beam utilization during scanned ion implantation |
Andrew M. Ray |
2005-10-11 |
$5,837,000 |
| 6847847 |
Retina implant assembly and methods for manufacturing the same |
Wilfried Nisch, Alfred Stett, Markus Schubert, Heinz-Gerhard Graf, Hugo Hammerle +3 more |
2005-01-25 |
|