Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8173980 | Gas cluster ion beam system with cleaning apparatus | Michael Graf | 2012-05-08 |
| 7230204 | Method and system for temperature control of a substrate | Yuji Tsukamoto | 2007-06-12 |
| 7017652 | Method and apparatus for transferring heat from a substrate to a chuck | Lianjun Liu | 2006-03-28 |