Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114270 | Scanning magnet design with enhanced efficiency | Bo H. Vanderberg | 2021-09-07 |
| 11037754 | Scan and corrector magnet designs for high throughput scanned beam ion implanter | Bo H. Vanderberg | 2021-06-15 |
| 10573485 | Tetrode extraction apparatus for ion source | Wilhelm Platow, Bo H. Vanderberg, Neil J. Bassom, Michael Cristoforo, Joshua Abeshaus | 2020-02-25 |
| 10553392 | Scan and corrector magnet designs for high throughput scanned beam ion implanter | Bo H. Vanderberg | 2020-02-04 |
| 10483086 | Beam profiling speed enhancement for scanned beam implanters | Andy Ray, Bo H. Vanderberg | 2019-11-19 |
| 10037877 | Ion implantation system having beam angle control in drift and deceleration modes | Bo H. Vanderberg | 2018-07-31 |
| 9679739 | Combined electrostatic lens system for ion implantation | Bo H. Vanderberg | 2017-06-13 |
| 9620327 | Combined multipole magnet and dipole scanning magnet | — | 2017-04-11 |
| 8963107 | Beam line design to reduce energy contamination | Bo H. Vanderberg | 2015-02-24 |
| 8803110 | Methods for beam current modulation by ion source parameter modulation | Michael Graf, William F. DiVergilio, Daniel R. Tieger | 2014-08-12 |
| 8653486 | Method and apparatus for improved uniformity control with dynamic beam shaping | — | 2014-02-18 |
| 8637838 | System and method for ion implantation with improved productivity and uniformity | Bo H. Vanderberg | 2014-01-28 |
| 8421039 | Method and apparatus for improved uniformity control with dynamic beam shaping | — | 2013-04-16 |
| 8378313 | Uniformity of a scanned ion beam | Andy Ray, Bo H. Vanderberg | 2013-02-19 |
| 8168941 | Ion beam angle calibration and emittance measurement system for ribbon beams | Marvin Farley, Donald N. Polner, Geoffrey Ryding, Theodore H. Smick, Takao Sakase +5 more | 2012-05-01 |
| 8089052 | Ion source with adjustable aperture | Daniel R. Tieger, William F. DiVergilio, Michael Graf | 2012-01-03 |
| 8008636 | Ion implantation with diminished scanning field effects | — | 2011-08-30 |
| 7858955 | System and method of controlling broad beam uniformity | Shu Satoh, Manny Sieradzki | 2010-12-28 |
| 7615763 | System for magnetic scanning and correction of an ion beam | Bo H. Vanderberg, Robert D. Rathmell | 2009-11-10 |
| 7589333 | Methods for rapidly switching off an ion beam | Michael Graf, William F. DiVergilio, Daniel R. Tieger | 2009-09-15 |
| 7566886 | Throughput enhancement for scanned beam ion implanters | Bo H. Vanderberg | 2009-07-28 |
| 7550751 | Ion beam scanning control methods and systems for ion implantation uniformity | Victor M. Benveniste, Bo H. Vanderberg | 2009-06-23 |
| 7453074 | Ion implanter with ionization chamber electrode design | William F. DiVergilio | 2008-11-18 |
| 7399980 | Systems and methods for beam angle adjustment in ion implanters | Bo H. Vanderberg | 2008-07-15 |
| 7227160 | Systems and methods for beam angle adjustment in ion implanters | Bo H. Vanderberg | 2007-06-05 |