Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Beam line design to reduce energy contamination

Beam line design to reduce energy contamination

US Patent 8963107 · Granted Feb 24, 2015

Estimated economic value: $2,916,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Scanning magnet design with enhanced efficiency2021
Scanning magnet design with enhanced efficiency2021
Scan and corrector magnet designs for high throughput scanned beam ion implanter2021
Scan and corrector magnet designs for high throughput scanned beam ion implanter2021
Tetrode extraction apparatus for ion source2020
Tetrode extraction apparatus for ion source2020
Scan and corrector magnet designs for high throughput scanned beam ion implanter2020
Scan and corrector magnet designs for high throughput scanned beam ion implanter2020
Beam profiling speed enhancement for scanned beam implanters2019
Beam profiling speed enhancement for scanned beam implanters2019
Ion implantation system having beam angle control in drift and deceleration mode2018
Ion implantation system having beam angle control in drift and deceleration mode2018