Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431332 | High energy implanter with small footprint | Wilhelm Platow, Neil J. Bassom | 2025-09-30 |
| 11923169 | Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism | Causon Ko-Chuan Jen, Genise Bonacorsi, William Bintz | 2024-03-05 |
| 11244800 | Stepped indirectly heated cathode with improved shielding | Wilhelm Platow, Neil J. Bassom, Paul Silverstein, Marvin Farley | 2022-02-08 |
| 10342114 | RF resonator for ion beam acceleration | — | 2019-07-02 |
| 10024825 | Wafer clamp detection based on vibration or acoustic characteristic analysis | — | 2018-07-17 |
| 9711328 | Method of measuring vertical beam profile in an ion implantation system having a vertical beam angle device | — | 2017-07-18 |
| 9490185 | Implant-induced damage control in ion implantation | Ronald N. Reece, Serguei Kondratenko, Andy Ray | 2016-11-08 |
| 9111719 | Method for enhancing beam utilization in a scanned beam ion implanter | — | 2015-08-18 |
| 8933424 | Method for measuring transverse beam intensity distribution | — | 2015-01-13 |
| 8227773 | Versatile beam glitch detection system | — | 2012-07-24 |
| 8080814 | Method for improving implant uniformity during photoresist outgassing | — | 2011-12-20 |
| 8071964 | System and method of performing uniform dose implantation under adverse conditions | — | 2011-12-06 |
| 8035080 | Method and system for increasing beam current above a maximum energy for a charge state | — | 2011-10-11 |
| 7973290 | System and method of beam energy identification for single wafer ion implantation | — | 2011-07-05 |
| 7858955 | System and method of controlling broad beam uniformity | Edward C. Eisner, Manny Sieradzki | 2010-12-28 |
| 7842931 | Extraction electrode manipulator | John A. Adamik, Manny Sieradzki | 2010-11-30 |
| 7705328 | Broad ribbon beam ion implanter architecture with high mass-energy capability | Manny Sieradzki | 2010-04-27 |
| 7611975 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Peter Michael Banks, Matthew Peter Dobson, Peter Kindersley, Takao Sakase +2 more | 2009-11-03 |
| 7528390 | Broad beam ion implantation architecture | — | 2009-05-05 |
| 7282427 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2007-10-16 |
| 7253424 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2007-08-07 |
| 7235797 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase +2 more | 2007-06-26 |
| 7049210 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2006-05-23 |
| 6998626 | Method of producing a dopant gas species | Geoffrey Ryding | 2006-02-14 |
| 6908836 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase +2 more | 2005-06-21 |