| 7928413 |
Ion implanters |
Gregory Robert Alcott |
2011-04-19 |
$9,957,000 |
| 7838849 |
Ion implanters |
Gregory Robert Alcott |
2010-11-23 |
$4,531,000 |
| 7807984 |
Ion implanters |
Gregory Robert Alcott, Matthew Castle, Martin A. Hilkene |
2010-10-05 |
$8,418,000 |
| 7611975 |
Method of implanting a substrate and an ion implanter for performing the method |
Peter Michael Banks, Matthew Peter Dobson, Peter Kindersley, Takao Sakase, Marvin Farley +2 more |
2009-11-03 |
$16,291,000 |
| 7586101 |
Ion sources for ion implantation apparatus |
Richard Goldberg, Christopher Burgess, David George Armour, Erik J. H. Collart |
2009-09-08 |
$12,578,000 |
| 7351986 |
Method and apparatus for reducing cross contamination of species during ion implantation |
— |
2008-04-01 |
$94,557,000 |
| 7282427 |
Method of implanting a substrate and an ion implanter for performing the method |
Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks +4 more |
2007-10-16 |
$76,989,000 |
| 7253424 |
Method of implanting a substrate and an ion implanter for performing the method |
Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks +4 more |
2007-08-07 |
$22,752,000 |
| 7235797 |
Method of implanting a substrate and an ion implanter for performing the method |
Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase, Marvin Farley +2 more |
2007-06-26 |
$17,529,000 |
| 7087913 |
Ion implanter electrodes |
Richard Goldberg, David George Armour, Christopher Burgess |
2006-08-08 |
$12,525,000 |
| 7049210 |
Method of implanting a substrate and an ion implanter for performing the method |
Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks +4 more |
2006-05-23 |
$10,996,000 |
| 6956223 |
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
Theodore H. Smick, Frank D. Roberts, II, Marvin Farley, Geoffrey Ryding, Takao Sakase +2 more |
2005-10-18 |
$29,253,000 |
| 6908836 |
Method of implanting a substrate and an ion implanter for performing the method |
Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase, Marvin Farley +2 more |
2005-06-21 |
$30,094,000 |
| 6847043 |
Ion sources for ion implantation apparatus |
Richard Goldberg, Christopher Burgess, David George Armour, Erik J. H. Collart |
2005-01-25 |
$27,919,000 |
| 6818909 |
Ion sources for ion implantation apparatus |
Peter Michael Banks, Andrew Allen, Neil Clarke, Matthew Peter Dobson |
2004-11-16 |
$26,978,000 |
| 6686601 |
Ion sources for ion implantation apparatus |
Peter Michael Banks, Andrew Allen, Neil Clarke, Matthew Peter Dobson |
2004-02-03 |
$30,271,000 |
| 6559454 |
Ion beam generation apparatus |
Erik J. H. Collart, Bernard Harrison, Amir Al-Bayati, Chris James Burgess, David George Armour +4 more |
2003-05-06 |
$19,934,000 |
