Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422357 | Chamber moisture control using narrow optical filters measuring emission lines | Sven Schramm, Elias Martinez, Amir Bayati | 2025-09-23 |
| 12072267 | Method and hardware for post maintenance vacuum recovery system | — | 2024-08-27 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more | 2024-07-16 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Ala Moradian, Zuoming ZHU, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi, Patricia M. Liu +1 more | 2024-01-02 |
| 11735447 | Enhanced process and hardware architecture to detect and correct realtime product substrates | Kartik Santhanam, Kartik Shah, Wolfgang Aderhold, Stephen Moffatt | 2023-08-22 |
| 11635338 | Rapid chamber vacuum leak check hardware and maintenance routine | Surendra Singh SRIVASTAVA | 2023-04-25 |
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 |
| 10500614 | Temperature controlled remote plasma clean for exhaust deposit removal | David K. Carlson, Matthew D. Scotney-Castle | 2019-12-10 |
| 10276369 | Material deposition for high aspect ratio structures | Jun Xue, Ludovic Godet, Matthew D. Scotney-Castle | 2019-04-30 |
| 10233538 | Demagnetization of magnetic media by C doping for HDD patterned media application | Roman Gouk, Matthew D. Scotney-Castle, Peter I. Porshnev | 2019-03-19 |
| 9852902 | Material deposition for high aspect ratio structures | Jun Xue, Ludovic Godet, Matthew D. Scotney-Castle | 2017-12-26 |
| 9646642 | Resist fortification for magnetic media patterning | Christopher Dennis Bencher, Roman Gouk, Steven Verhaverbeke, Li-Qun Xia, Yong Won Lee +2 more | 2017-05-09 |
| 9553174 | Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications | Ludovic Godet, Christopher R. Hatem, Matthew D. Scotney-Castle | 2017-01-24 |
| 9390930 | Surface stabilization process to reduce dopant diffusion | Matthew S. Rogers | 2016-07-12 |
| 9376746 | Demagnetization of magnetic media by C doping for HDD patterned media application | Roman Gouk, Matthew D. Scotney-Castle, Peter I. Porshnev | 2016-06-28 |
| 8673162 | Methods for substrate surface planarization during magnetic patterning by plasma immersion ion implantation | Roman Gouk, Steven Verhaverbeke, Matthew D. Scotney-Castle | 2014-03-18 |
| 8658242 | Resist fortification for magnetic media patterning | Christopher Dennis Bencher, Roman Gouk, Steven Verhaverbeke, Li-Qun Xia, Yong Won Lee +2 more | 2014-02-25 |
| 8586952 | Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications | Matthew D. Scotney-Castle, Peter I. Porshnev, Roman Gouk, Steven Verhaverbeke | 2013-11-19 |
| 8501605 | Methods and apparatus for conformal doping | Kartik Santhanam, Manoj Vellaikal, Mark R. Lee, Matthew D. Scotney-Castle, Peter I. Porshnev | 2013-08-06 |
| 8492177 | Methods for quantitative measurement of a plasma immersion process | Daping Yao, Peter I. Porshnev, Matthew D. Scotney-Castle, Manoj Vellaikal | 2013-07-23 |
| 8354035 | Method for removing implanted photo resist from hard disk drive substrates | Majeed A. Foad, Matthew D. Scotney-Castle, Roman Gouk, Steven Verhaverbeke, Peter I. Porshnev | 2013-01-15 |
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Matthew D. Scotney-Castle, Canfeng Lai +2 more | 2011-08-23 |
| 7989329 | Removal of surface dopants from a substrate | Kartik Ramaswamy, Kenneth S. Collins, Biagio Gallo, Hiroji Hanawa, Majeed A. Foad +2 more | 2011-08-02 |
| 7968401 | Reducing photoresist layer degradation in plasma immersion ion implantation | Kartik Santhanam, Yen B. Ta, Peter I. Porshnev, Majeed A. Foad | 2011-06-28 |
| 7872247 | Ion beam guide tube | Geoffrey Ryding, Gregory Robert Alcott, Lee Spraggon, Robert J. Mitchell, Matthew Castle +1 more | 2011-01-18 |