Issued Patents All Time
Showing 1–25 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhepeng CONG, Avinash Shervegar, Enle CHOO, Ala Moradian | 2025-08-12 |
| 12371776 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Richard O. Collins | 2025-07-29 |
| 12341038 | Dynamic and localized temperature control for epitaxial deposition reactors | Sathya Chary | 2025-06-24 |
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Brian H. Burrows, Richard O. Collins, Enle CHOO, Danny D. WANG +5 more | 2025-06-03 |
| 12261062 | Spot heating by moving a beam with horizontal rotary motion | Shu-Kwan LAU, Toshiyuki Nakagawa | 2025-03-25 |
| 12249626 | Arsenic diffusion profile engineering for transistors | Patricia M. Liu, Flora Fong-Song CHANG | 2025-03-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |
| 12188148 | Multi-layer EPI chamber body | Shu-Kwan LAU, Richard O. Collins, Brian H. Burrows | 2025-01-07 |
| 12183606 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2024-12-31 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Joseph M. Ranish +3 more | 2024-12-10 |
| 12068155 | Anisotropic sige:b epitaxial film growth for gate all around transistor | Chen-Ying WU, Xuebin Li, Sathya Chary, Yi-Chiau Huang, Saurabh Chopra | 2024-08-20 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz, Martin A. Hilkene +4 more | 2024-07-16 |
| 12033874 | EPI chamber with full wafer laser heating | Shu-Kwan LAU, Adel George Tannous, Patrick C. Genis | 2024-07-09 |
| 12015042 | Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement | Papo CHEN, Schubert S. Chu, Errol Antonio C. Sanchez, John Boland, Lori D. Washington +3 more | 2024-06-18 |
| 11923221 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2024-03-05 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11842907 | Spot heating by moving a beam with horizontal rotary motion | Shu-Kwan LAU, Toshiyuki Nakagawa | 2023-12-12 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Joseph M. Ranish +3 more | 2023-11-21 |
| 11781212 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Richard O. Collins | 2023-10-10 |
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Jyothi RAJEEVAN, Ala Moradian, Zuoming ZHU, Errol Antonio C. Sanchez +1 more | 2023-08-22 |
| 11680338 | Linear lamp array for improved thermal uniformity and profile control | Brian H. Burrows, Shu-Kwan LAU | 2023-06-20 |
| 11604089 | Mass flow verification based on rate of pressure decay | Justin Hough, Marcel E. Josephson | 2023-03-14 |
| 11519773 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada | 2022-12-06 |