Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183606 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram | 2024-12-31 |
| 11923221 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram | 2024-03-05 |
| 11604089 | Mass flow verification based on rate of pressure decay | Zhiyuan Ye, Justin Hough | 2023-03-14 |
| 11519773 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Ashley M. Okada | 2022-12-06 |
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more | 2022-12-06 |
| 11462426 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram | 2022-10-04 |
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more | 2021-11-09 |
| 10943803 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram | 2021-03-09 |
| 10866135 | Methods, systems, and apparatus for mass flow verification based on rate of pressure decay | Zhiyuan Ye, Justin Hough | 2020-12-15 |
| 10684159 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Ashley M. Okada | 2020-06-16 |
| 10453721 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram | 2019-10-22 |
| 10269600 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram | 2019-04-23 |
| 9347696 | Compact ampoule thermal management system | David K. Carlson, Errol Antonio C. Sanchez, Kenric Choi, Dennis L. Demars | 2016-05-24 |
| 9279604 | Compact ampoule thermal management system | David K. Carlson, Errol Antonio C. Sanchez, Kenric Choi, Dennis L. Demars, Emre Cuvalci +1 more | 2016-03-08 |
| 9032990 | Chemical delivery system | David K. Carlson, Steve Jumper, Errol Antonio C. Sanchez | 2015-05-19 |
| 7798388 | Method of diffusion bonding a fluid flow apparatus | Mark Crockett, John W. Lane, Vincent Kirchhoff, Hong P. Gao, Bhaswan Manjunath | 2010-09-21 |