| 12183606 |
Methods and assemblies for gas flow ratio control |
Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram |
2024-12-31 |
$49,330,000 |
| 11923221 |
Methods and assemblies for gas flow ratio control |
Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram |
2024-03-05 |
$73,319,000 |
| 11604089 |
Mass flow verification based on rate of pressure decay |
Zhiyuan Ye, Justin Hough |
2023-03-14 |
$86,512,000 |
| 11519773 |
Methods, systems, and apparatus for mass flow verification based on choked flow |
Kevin Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Ashley M. Okada |
2022-12-06 |
$44,170,000 |
| 11520358 |
Gas-pulsing-based shared precursor distribution system and methods of use |
Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more |
2022-12-06 |
$44,170,000 |
| 11462426 |
Methods and assemblies for gas flow ratio control |
Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram |
2022-10-04 |
$41,370,000 |
| 11169547 |
Gas-pulsing-based shared precursor distribution system and methods of use |
Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more |
2021-11-09 |
$68,627,000 |
| 10943803 |
Methods and assemblies for gas flow ratio control |
Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram |
2021-03-09 |
$63,182,000 |
| 10866135 |
Methods, systems, and apparatus for mass flow verification based on rate of pressure decay |
Zhiyuan Ye, Justin Hough |
2020-12-15 |
$107,472,000 |
| 10684159 |
Methods, systems, and apparatus for mass flow verification based on choked flow |
Kevin Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Ashley M. Okada |
2020-06-16 |
$36,933,000 |
| 10453721 |
Methods and assemblies for gas flow ratio control |
Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram |
2019-10-22 |
$16,291,000 |
| 10269600 |
Methods and assemblies for gas flow ratio control |
Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram |
2019-04-23 |
$20,753,000 |
| 9347696 |
Compact ampoule thermal management system |
David K. Carlson, Errol Antonio C. Sanchez, Kenric Choi, Dennis L. Demars |
2016-05-24 |
$18,549,000 |
| 9279604 |
Compact ampoule thermal management system |
David K. Carlson, Errol Antonio C. Sanchez, Kenric Choi, Dennis L. Demars, Emre Cuvalci +1 more |
2016-03-08 |
$13,282,000 |
| 9032990 |
Chemical delivery system |
David K. Carlson, Steve Jumper, Errol Antonio C. Sanchez |
2015-05-19 |
$22,098,000 |
| 7798388 |
Method of diffusion bonding a fluid flow apparatus |
Mark Crockett, John W. Lane, Vincent Kirchhoff, Hong P. Gao, Bhaswan Manjunath |
2010-09-21 |
$8,059,000 |
